Multi-Head Precision Pump with Replaceable Liners
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Solution Overview
Problem
Current semiconductor manufacturing systems require multiple pumps for handling different chemicals, leading to increased complexity, cost, and maintenance due to the need to change surfaces contacting the processing fluids, which is cumbersome and expensive.
Innovation Solution
A high-precision pump design that employs multiple pumping heads, each capable of handling a different type of manufacturing fluid, sharing a common actuation mechanism, allowing for fast and frequent switching between heads without the need to change surfaces, thus reducing the number of actuation mechanisms and saving space and resources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple pumps are used to handle different chemicals, then each chemical can be pumped with dedicated surfaces, but the system complexity and cost increase significantly
Solution Approach 1:
The pump head is designed with replaceable liners that can be swapped to handle different chemicals. Each liner is made from materials compatible with specific chemical types, allowing a single pump body to universally handle multiple chemicals without cross-contamination. This multi-functionality resolves the contradiction by maintaining chemical purity through dedicated surfaces while avoiding the need for multiple complete pumps.
Solution Approach 2:
The pump is segmented into a permanent pump body and replaceable liner components. The liner is the only part that contacts the chemical and can be quickly exchanged, while the pump body remains stationary and reusable. This segmentation allows rapid changeover between different chemicals, reducing system complexity while maintaining purity requirements.
2Reliability
If pump heads are changed to handle different chemicals, then surface compatibility is maintained, but the time and complexity of changing surfaces increases
Solution Approach 1:
Multiple liners compatible with different chemicals are pre-prepared and stored ready for use. When a chemical change is required, the appropriate liner is already available and can be quickly installed without on-site modification or preparation time. This preliminary preparation significantly reduces the time penalty associated with surface changes.
Solution Approach 2:
The liner installation mechanism is designed to be dynamic and quick, allowing rapid removal and installation of liners. The pump head incorporates features such as quick-release clamps or bayonet mounts that enable liner changes in minutes rather than hours, making the surface change process adaptable to frequent chemical switches.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and precise metering of multiple chemicals without surface changes, reducing complexity, cost, and maintenance, while maintaining high purity and preventing contamination, thereby optimizing resource utilization in semiconductor processing.
Implementation Method 1
At least one diaphragm is provided that separates each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid
Implementation Method 2
An actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers is provided that is in fluid communication with the plurality of actuating fluid chambers to permit flow into each actuating fluid chamber of substantially incompressible actuating fluid
Implementation Method 3
The pump pressurizes process fluid in a line to a dispense point
Data Source
AI summary
A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.