Multi-Head Scanning Probe Microscopy with Independent Actuation
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Solution Overview
Problem
Scanning probe microscopy devices, such as atomic force microscopy (AFM), face challenges in throughput due to the slow process of scanning multiple sites on a sample surface, which is inefficient for industrial applications like the semiconductor industry.
Innovation Solution
The implementation of a scanning probe microscopy device with multiple probe heads mounted on individually movable support bases, each equipped with its own plane actuator unit, allowing for independent motion in orthogonal directions, enabling simultaneous scanning of multiple sites on a sample surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single probe tip is used for scanning the sample surface, then high measurement precision is achieved, but productivity is low due to slow scanning speed
Solution Approach 1:
The invention divides the scanning function into multiple independent probe tips (e.g., 9 probe tips arranged in a 3x3 array), allowing simultaneous scanning of multiple regions on the sample surface. Each probe tip operates independently to scan its own region, thereby multiplying the overall throughput while maintaining the sub-nanometer resolution capability of individual tips.
2Productivity
If multiple probe heads are used to scan simultaneously, then productivity is improved, but device complexity increases
Solution Approach 1:
The invention employs multiple support bases that share the same structural design and actuator configuration. Each support base is a universal module capable of carrying probe heads and performing identical scanning operations. This modular approach allows the system to achieve multi-site simultaneous scanning while managing complexity through standardization and repetition of proven components.
3Speed
If multiple support bases with individual actuators are implemented, then scanning speed is improved, but ease of operation deteriorates due to coordinated control requirements
Solution Approach 1:
The invention incorporates feedback mechanisms that continuously monitor the positions and operational status of all support bases and probe tips. This feedback system enables the control unit to coordinate the movement and scanning operations of multiple support bases automatically, reducing the operational burden on the user while maintaining precise control over the complex multi-site scanning process.
Data Source
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AI summary
Scanning probe microscope for mapping a sample surface, comprising a plurality of probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, the device further comprising a plurality of Z-position detectors for determining a position of each probe along a Z-direction when the probe is in contact with the sample surface; wherein the plurality of probes are mounted on a plurality of heads and each of said heads is mounted on a support base, which is arranged for individually moving its associated head relative to the sample; and wherein each support base comprises a plane actuator unit comprising at least one of said motion actuators for moving the head in at least one direction parallel to the sample surface, wherein the plane actuator unit is located at a first mounting position along said support base, said first mounting position being remote from a second mounting position, wherein the head associated with the support base is mounted on the second mounting position on the support base.