Multi-Heater Fluid Heating Control for Uniform Process Liquid Temperature
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Solution Overview
Problem
Conventional substrate processing apparatuses experience non-uniform heating of process liquids due to varying numbers of heaters being simultaneously active during a heating cycle, leading to drastic changes in heating degree over time, which can result in uneven processing and premature heater failure.
Innovation Solution
A control system that calculates the required output and cycle period for a heating unit with multiple heaters, ensuring that the number of simultaneously active heaters remains consistent by alternating their usage in a predetermined manner, preventing drastic variations in heating degree and extending heater lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If heaters are controlled in a periodically divided manner during each heating cycle, then heater lifespan is extended and simultaneous usage is reduced, but heating degree varies drastically over time
Solution Approach 1:
The patent applies periodic action by controlling heaters to operate in alternating cycles rather than continuously. The control unit alternates the operation of multiple heaters in a periodic manner, allowing each heater to rest after a predetermined operation period. This periodic operation extends heater lifespan by reducing continuous usage while maintaining effective heating through sequential activation of multiple heaters.
Solution Approach 2:
The patent implements preliminary action by pre-planning the operation schedule of multiple heaters. The control unit determines in advance which heaters will operate during specific time periods and coordinates their activation sequences. This preliminary arrangement ensures that heaters are alternated systematically, preventing any single heater from being overloaded while maintaining consistent overall heating output throughout the process.
2Productivity
If multiple heaters are operated simultaneously to maintain temperature, then heating efficiency is improved, but heater failure risk increases due to excessive simultaneous usage
Solution Approach 1:
The patent applies segmentation by dividing the heating function across multiple heaters that operate in sequence rather than all simultaneously. The control unit segments the total heating requirement into portions handled by different heaters at different time intervals. This segmentation reduces the burden on any single heater, extending their operational lifespan while collectively maintaining the required heating efficiency for the substrate processing.
Solution Approach 2:
The patent uses periodic action to alternate heater operation in structured cycles. Instead of continuous simultaneous operation, heaters are activated in periodic sequences with predetermined operation periods followed by rest periods. This periodic alternation maintains adequate heating efficiency through cumulative heat input while significantly reducing the reliability risk associated with excessive simultaneous heater usage.
3Stability of the object's composition
If heaters are kept on continuously to maintain preset temperature, then temperature stability is improved, but heater lifespan is reduced due to prolonged operation
Solution Approach 1:
The patent applies merging by combining the functions of multiple heaters to achieve continuous heating coverage. While individual heaters operate periodically with rest periods, the control unit coordinates multiple heaters so that their combined operation maintains continuous or near-continuous heating. This merging of multiple heater functions preserves temperature stability without requiring any single heater to operate continuously, thereby extending overall system reliability.
Solution Approach 2:
The patent implements periodic action by structuring heater operation into alternating cycles of activation and rest. Each heater operates for a predetermined period then enters a rest period, but the coordinated periodic operation of multiple heaters ensures that heating coverage remains continuous. This periodic alternation allows individual heaters to recover during rest periods, extending their lifespan while maintaining stable processing temperatures through the combined output of multiple heaters.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution maintains a consistent heating degree for the process liquid throughout the cycle, reducing the risk of uneven processing and prolonging heater lifespan by ensuring consistent heater usage, thereby improving processing reliability and reducing maintenance frequency.
Implementation Method 1
a heating unit configured to heat a fluid... a plurality of heating devices respectively configured to heat the fluid
Data Source
AI summary
In a heating unit, based on a required output amount Q, a control part 50 performs: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devices 24a is continuously kept on throughout a heating cycle, and all or one or more heating devices 24a are controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devices 24a are continuously kept on throughout the heating cycle, and all or one or more heating devices 24a among the remaining heating devices 24a are controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devices 24a that are simultaneously kept on during the heating cycle is made not more than 1.