Multi-Height Transfer Arm for Substrate Conveyance
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Solution Overview
Problem
Substrate processing apparatuses face challenges in reducing substrate conveyance time and improving productivity due to lengthy loading and unloading processes.
Innovation Solution
A substrate processing apparatus with a load-lock chamber, transfer chamber, and processing chambers, featuring a transfer arm with multiple sub-arms of different heights and end effectors that allow for simultaneous loading and unloading of substrates, along with a rotation mechanism to optimize substrate positioning and transfer efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a robot arm is used to convey substrates into the processing chamber, then substrates can be loaded and unloaded, but the substrate conveyance time becomes very long
Solution Approach 1:
The transfer arm is divided into multiple sub-arms (first sub-arm, second sub-arm, third sub-arm) that can operate independently and simultaneously. Each sub-arm can transfer substrates between different chambers at the same time, segmenting the overall transfer process into parallel operations that reduce total conveyance time.
Solution Approach 2:
The invention introduces a vertical dimension by having sub-arms at different heights. The first sub-arm operates at a first height, the second sub-arm at a second height, and the third sub-arm at a third height. This multi-level arrangement allows simultaneous substrate transfers without spatial interference, effectively utilizing three-dimensional space to parallelize operations.
2Loss of time
If multiple substrates are processed in parallel using multiple sub-arms at different heights, then substrate conveyance time is reduced, but the device complexity increases
Solution Approach 1:
Multiple sub-arms with different functions are integrated into a single transfer arm assembly. The first sub-arm transfers substrates between the load-lock chamber and processing chamber, the second sub-arm transfers substrates between the load-lock chamber and another processing chamber, and the third sub-arm performs additional transfer operations. This multi-functional design consolidates what would otherwise be separate transfer mechanisms into one unified structure.
Solution Approach 2:
The transfer arm structure employs a nested configuration where multiple sub-arms are arranged concentrically or in overlapping configurations. The sub-arms are positioned at different radial distances from the central axis, with end effectors that can be retracted or extended as needed. This nesting allows compact packaging of multiple transfer functions within a limited spatial envelope.
Data Source
AI summary
Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.