Multi-Holder Substrate Transport Mechanism for Semiconductor Processing
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Solution Overview
Problem
Current substrate transport mechanisms in double-wafer type processing modules transport wafers one by one, leading to inefficiencies in loading and unloading, which limits throughput in semiconductor device manufacturing processes.
Innovation Solution
A substrate processing apparatus with a transport mechanism capable of simultaneously transporting multiple wafers between a load port, load lock chamber, and processing modules, utilizing multiple substrate holders and a controller to optimize operations based on processing configurations, allowing for simultaneous processing and transport of multiple wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are transported one by one using a single substrate holder, then the transport mechanism is simple, but the throughput is limited
Solution Approach 1:
The substrate transport mechanism is divided into multiple independent substrate holders (first substrate holder and second substrate holder) that can operate independently. Each holder can transport substrates between different locations (load port, load lock chamber, processing module) simultaneously, thereby increasing throughput without requiring a completely complex new system design.
Solution Approach 2:
Multiple substrate holders are merged into a single integrated transport mechanism system controlled by one controller. This allows coordinated operation of multiple holders to handle multiple substrates in parallel, improving productivity while maintaining manageable system complexity through unified control.
2Productivity
If multiple substrate holders are used to transport multiple substrates simultaneously, then throughput is improved, but the control complexity increases
Solution Approach 1:
The controller is designed with multi-functionality to handle different transport scenarios: it can control substrate holders to operate independently when processing modules handle one substrate at a time, and coordinate multiple holders simultaneously when processing modules can handle multiple substrates. This universal control approach manages complexity by adapting to different operational modes.
Solution Approach 2:
The control strategy is dynamic and adapts based on the processing module's capability. The controller adjusts its operation mode depending on whether the processing module processes one substrate at a time or multiple substrates simultaneously, optimizing throughput while managing control complexity through conditional operation patterns.
3Productivity
If access cycles to the load lock chamber are reduced, then throughput is improved, but the transport coordination becomes more complex
Solution Approach 1:
The system prepares substrate holders in advance with substrates before they are needed at the processing module. The first substrate holder can load substrates at the load port while the second substrate holder simultaneously loads substrates at the load lock chamber, preparing multiple substrates ahead of time to minimize access cycles and reduce waiting time.
Solution Approach 2:
Multiple substrate holders operate continuously and simultaneously to maintain uninterrupted substrate supply to the processing module. While one holder is transporting or loading a substrate, another holder is already preparing the next substrate, ensuring continuous useful action and minimizing idle time that would increase access cycles.
Data Source
AI summary
A substrate processing apparatus includes a load port, a load lock chamber, a processing module, a substrate transport mechanism, and a controller. The substrate transport mechanism includes a plurality of substrate holders, each of which is configured hold one substrate. The controller is configured to control, when the processing module is configured to process one substrate at a time, the substrate transport mechanism such that a first substrate holder transports the substrate between the load port and the processing module and a second substrate holder transports the substrate between the load lock chamber and the processing module. The controller is further configured to control, when the processing module is configured to simultaneously process the plurality of substrates, the substrate transport mechanism such that the plurality of substrate holders simultaneously transport the plurality of substrates between the load port, the load lock chamber, and the processing module.