Multi-Interposer Bridge Layout for Stress-Limited Die Integration

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Solution Overview

Problem

As semiconductor integrated circuits shrink, connecting multiple functional dies through interposers becomes increasingly challenging due to issues such as stress and stitching problems associated with large interposers, which affect reliability and fabrication efficiency in chip-on-wafer-on-substrate systems.

Innovation Solution

The use of bridge components on a molded platform to partition and connect multiple chip-on-wafer structures, integrating multiple interposers to form a smaller, more reliable platform, thereby reducing stress and avoiding stitching issues by using multiple smaller interposers and encapsulating them with suitable materials for protection and connectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single large interposer is used to connect multiple functional dies, then connectivity between dies is achieved, but stress and stitching problems increase reducing reliability

Engineering Contradiction:
Improvedevice reliabilityVSAvoidstress and stitching problems
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent divides a single large interposer into multiple smaller interposers (first interposer and second interposer). Each interposer connects to a subset of functional dies, thereby segmenting the stress and eliminating stitching problems associated with large single interposers. This segmentation maintains die connectivity while improving overall device reliability.

Inventive Principle:
Principle #1Segmentation

2Reliability

If multiple smaller interposers are used to reduce stress, then reliability improves, but device complexity increases

Engineering Contradiction:
Improvedevice reliabilityVSAvoidinterposer configuration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The substrate acts as an intermediary that connects multiple interposers (first interposer and second interposer). Each interposer is independently configured on the substrate, simplifying individual interposer design while the substrate provides the integration framework. This mediator approach reduces overall system complexity compared to designing a single complex large interposer.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If multiple chip-on-wafer structures are integrated, then functionality increases, but fabrication complexity increases

Engineering Contradiction:
Improvefunctional integration capabilityVSAvoidfabrication process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The fabrication process is segmented into independent stages for each interposer-die assembly. Each interposer can be fabricated and tested independently before final integration on the substrate, allowing parallel processing and simplifying the overall fabrication workflow despite multiple functional integrations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Interposers and their attached functional dies are prepared and pre-assembled before final substrate integration. This preliminary action allows independent optimization and testing of each module, reducing fabrication complexity during final assembly while maintaining high functional integration capability.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11854983B2Semiconductor devices and methods of manufacture
Publication Date: 2023.12.26 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11854983B2 patent drawing
  • US11854983B2 patent drawing
  • US11854983B2 patent drawing

AI summary

Semiconductor devices and methods of manufacture are provided. In embodiments the semiconductor device includes a substrate, a first interposer bonded to the substrate, a second interposer bonded to the substrate, a bridge component electrically connecting the first interposer to the second interposer, two or more first dies bonded to the first interposer; and two or more second dies bonded to the second interposer.