Multi-Irradiation Imaging for Positional Shift Compensation
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Solution Overview
Problem
In high-resolution and high-speed imaging applications, such as semiconductor and secondary battery inspection, positional shifts of target objects due to varying light directions and three-dimensional object geometries can hinder accurate detection, especially when objects are conveyed, leading to reduced detection reproducibility and probability.
Innovation Solution
An inspecting method involving an imaging device, a lighting device, and movement means that irradiates the object with light multiple times and adjusts the relative positions of the imaging and lighting devices and the object during a single imaging time, allowing for the extraction and combination of multiple images to determine the size and position of the target object accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple image sensors are arranged and images are combined after positional offset correction based on sensor arrangement, then high-definition image generation is achieved, but detection reproducibility deteriorates when light direction varies or objects are three-dimensional
Solution Approach 1:
The patent applies preliminary action by performing multiple irradiations and position changes before final image combination. Specifically, the lighting device irradiates the inspected object multiple times with different light directions, and the movement means changes relative positions between the lighting device, imaging device, and inspected object before combining images. This preliminary diversification of imaging conditions ensures that target objects are captured from multiple angles and positions, making the subsequent image combination more robust and improving detection reproducibility.
2Measurement precision
If image processing is performed to combine multiple images for high-definition output, then image quality improves, but processing time increases
Solution Approach 1:
The patent implements continuity of useful action by performing multiple irradiations and image captures within a single imaging time period. The lighting device irradiates the inspected object multiple times without interrupting the imaging process, and the imaging device continuously captures images during this period. This continuous operation allows multiple images to be acquired and combined efficiently, improving image quality while minimizing additional processing time.
3Productivity
If the inspected object is conveyed during inspection, then productivity improves, but positional shift of target objects increases
Solution Approach 1:
The patent applies dynamics by making the imaging system adaptable to moving objects. The movement means changes the relative positions of the lighting device, imaging device, and inspected object during inspection. When the inspected object is conveyed, the system dynamically adjusts by performing multiple irradiations and captures from different positions, ensuring that target objects are consistently detected despite their movement. This dynamic approach maintains measurement precision while allowing continuous inspection of conveyed objects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the reproducibility and probability of detecting target objects by compensating for positional shifts caused by varying light and object geometries, resulting in improved accuracy and reliability of defect detection in high-speed inspection processes.
Implementation Method 1
an irradiation step of irradiating, by the lighting device (2), the inspected object with light a plurality of times in one imaging time
Data Source
AI summary
The inspecting device includes a lighting device, an imaging device that images a sheet and outputs an image, movement means, and an image processing device. The lighting device irradiates the sheet with light a plurality of times in one imaging time. The movement means changes relative positions of the lighting device and the imaging device and the sheet in one imaging time. The image processing device extracts a plurality of images of a target object included in the image output by the imaging device, and combines the plurality of extracted images of the target object to determine a size of target object E.