Multi-Joint Substrate Lifter for Dust-Free Compact Handling
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently raising and lowering substrate holders while minimizing dust generation and optimizing space usage.
Innovation Solution
A lifting mechanism incorporating a multi-joint arm with a tip connected to a support, allowing for precise raising and lowering of the substrate holder between processing and load lock chambers, while maintaining a hermetically isolated internal space to reduce dust generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a ball screw or bellows lifting mechanism is used, then the substrate holder can be raised and lowered, but dust is generated during the lifting operation
Solution Approach 1:
The patent extracts the dust-generating components (ball screw or bellows) from the lifting mechanism and replaces them with a multi-joint arm system. The multi-joint arm raises and lowers the substrate holder through rotational motion of multiple joints without requiring enclosed mechanical transmission components, thereby eliminating dust generation while maintaining lifting functionality.
Solution Approach 2:
The patent replaces the traditional mechanical transmission system (ball screw or bellows) with a direct multi-joint arm mechanical system. Instead of using threaded rotation or flexible bellows to achieve linear motion, the system uses coordinated rotation of multiple joints in the multi-joint arm to directly position the substrate holder, eliminating the sources of dust generation.
2Volume of moving object
If a compact lifting mechanism is used, then space is saved, but the mechanism becomes more complex
Solution Approach 1:
The patent divides the lifting function into multiple segments through the multi-joint arm structure. Instead of using a single complex mechanism, the system segments the lifting motion into multiple rotational joints, each responsible for a portion of the positioning. This segmentation allows for a compact overall structure while distributing the mechanical complexity across simpler, modular joint components.
Solution Approach 2:
The patent transitions from linear motion mechanisms (ball screw, bellows) to rotational motion mechanisms (multi-joint arm). By changing the dimension of motion from linear to rotational, the system achieves a more compact footprint while using simpler, more standardized joint components that are easier to manufacture and maintain.
Data Source
AI summary
A lifting mechanism for raising or lowering a substrate holder configured to hold a plurality of substrates in a shelf-like manner, includes a support configured to support the substrate holder, and a multi-joint arm having a tip connected to the support to raise or lower the support.