Multi-Layer Side Track Buffer for Higher Container Storage

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Solution Overview

Problem

Existing storage systems in semiconductor manufacturing plants are inefficient due to limited storage capacity, as they typically allow only a single layer of containers, restricting the number of substrates that can be stored efficiently.

Innovation Solution

A side track buffer apparatus with multiple layers of plates and a driving unit that reciprocates upper plates laterally, allowing for the storage of multiple containers, facilitated by a transmission shaft or tension spring for movement and control, and sensors for detection and operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single layer storage system is used, then the structure is simple, but the storage capacity is limited

Engineering Contradiction:
Improvestorage system structureVSAvoidstorage capacity
Core Design Contradiction:
Device complexityVSQuantity of substance

Solution Approach 1:

The patent transitions from a single-layer storage system to a multi-layer stacked configuration, adding the vertical dimension to the storage architecture. Multiple plates are stacked vertically to form multiple storage layers, allowing containers to be stored in three-dimensional space rather than just on a single plane, thereby significantly increasing storage capacity without proportionally increasing the footprint area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The storage system is divided into multiple independent plates that can be stacked to form multiple layers. Each plate serves as an independent storage unit that can be individually positioned and accessed. This segmentation allows the system to scale storage capacity by adding or removing plates while maintaining structural modularity and operational flexibility.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If multiple layers of plates are introduced, then storage capacity increases, but the driving mechanism becomes more complex

Engineering Contradiction:
Improvestorage capacityVSAvoiddriving unit structure
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The driving unit is designed with a universal interface that can interact with multiple plates simultaneously or independently. The same driving mechanism can position any plate in the stack, and the plate structure is standardized across all layers, allowing a single driving system to control the entire multi-layer storage system without requiring separate mechanisms for each layer.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces a standardized interface or intermediary mechanism between the driving unit and the plates. This intermediary allows the driving unit to reciprocate plates in the lateral direction without direct complex connections to each plate, simplifying the overall driving mechanism while enabling multi-plate control through a unified interface design.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If plates are reciprocated in lateral direction, then container access is improved, but positioning precision requirements increase

Engineering Contradiction:
Improvecontainer accessVSAvoidplate positioning precision
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The system performs preliminary positioning actions by pre-establishing standardized guide rails and reciprocal paths for the plates. The driving unit is configured in advance to move plates along predetermined lateral trajectories, ensuring that containers are positioned in advance for optimal access. This preliminary arrangement reduces the need for high-precision real-time adjustments during container retrieval operations.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient storage of a large number of containers in multiple stages, enhancing the overall capacity and efficiency of substrate transportation in semiconductor manufacturing processes.

Implementation Method 1

The second driving member may be a tension spring. In this case, the second driving member may be installed in the side track buffer and connected to the upper plate.

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

The first driving member may be a transmission shaft for push.

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Data Source

PatentUS12509295B2Apparatus for storing container in multiple stages and facility for transporting substrate
Publication Date: 2025.12.30 SYSTEM ENGINEERING MEGA SOLUTION CO LTD
  • US12509295B2 patent drawing
  • US12509295B2 patent drawing
  • US12509295B2 patent drawing

AI summary

An apparatus for storing a container in multiple stages includes a side track buffer including a plurality of plates forming a plurality of layers so that a plurality of containers are seated thereon; and a driving unit reciprocating at least one upper plate among the plurality of plates in a lateral direction.