Multi-Layer Electrode Support for Uniform Pulse-Field Coating
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Solution Overview
Problem
Existing film coating apparatuses face challenges in achieving uniform deposition thickness on samples due to non-uniform electric fields and inefficient space utilization when handling multiple samples, leading to variations in film quality and increased chamber size requirements.
Innovation Solution
The electrode support and film coating apparatus design includes a multi-layered structure with alternating support members that can function as electrodes, allowing for uniform gas distribution and electric field application, supporting multiple samples in a compact setup, and facilitating easy polarity changes and gas supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If samples are stacked in the height direction to save space, then space utilization is improved, but deposition uniformity deteriorates due to non-uniform electric field distribution
Solution Approach 1:
The support structure is divided into multiple support members arranged in layers, with gas distribution openings segmented across different positions. This segmentation allows each region to receive optimized gas flow and electric field distribution, enabling uniform deposition even when samples are stacked vertically
Solution Approach 2:
Different regions of the support structure have locally optimized characteristics - gas distribution openings are positioned at specific locations to ensure each sample receives appropriate gas flow. The support members are arranged to create localized electric field conditions suitable for uniform deposition across all sample positions
2Quantity of substance
If electrode plate area is expanded to accommodate more horizontal samples, then sample capacity is improved, but apparatus size and complexity increase
Solution Approach 1:
Instead of expanding the electrode plate area horizontally, the invention utilizes the vertical dimension by arranging support members in multiple layers. Samples are supported at different heights, allowing multiple samples to be processed simultaneously without increasing the horizontal footprint of the apparatus
Solution Approach 2:
The support members serve multiple functions: they mechanically support samples, distribute gas through integrated openings, and participate in electric field formation. This multi-functionality reduces the need for separate components, simplifying the overall apparatus structure while increasing sample capacity
3Adaptability or versatility
If complex wiring is used to connect multiple electrodes to power supply, then electrode functionality is improved, but system complexity and installation difficulty increase
Solution Approach 1:
Multiple support members are electrically connected through conductive connections, merging them into a single functional electrode system. This allows multiple support members to be controlled by a single power supply connection, reducing wiring complexity while maintaining the ability to process multiple samples simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures uniform film coating on multiple samples with improved space utilization, faster coating times, and enhanced film quality by optimizing electric field distribution and gas flow, while reducing the apparatus' weight and complexity.
Implementation Method 1
the electrode support includes a plurality of support members disposed in multiple layers and spaced apart by a preset spacing, and at least one layer of support member is conductively coupled with a pulse power supply as a cathode of the pulse power supply
Implementation Method 2
The at least one layer of support member may comprise a support top plate and a support bottom plate, there is a space between the support top plate and the support bottom plate, and the support bottom plate may have at least one gas distribution opening
Data Source
AI summary
The present disclosure provides an electrode support, a supporting mechanism, a support, a film coating apparatus, and an application. The electrode support is applied to the film coating apparatus. The film coating apparatus allows coating of at least one to-be-coated workpiece. The film coating apparatus comprises a reaction chamber and a pulse power supply; the pulse power supply is used for providing a pulse electric field in the reaction chamber. The electrode support comprises support members arranged in multiple layers; the support member of each layer is separately retained at a preset spacing; at least one layer of the support member is conductively connected to the pulse power supply to serve as a negative electrode of the pulse power supply. The electrode support can uniformly load the to-be-coated workpiece and can be used as an electrode, and wiring between the electrode support and an external power supply is simple.