Multi-Layer Deposition Mask Structure for High Opening Rates
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Solution Overview
Problem
Existing mask manufacturing methods for light emitting display devices face challenges in achieving high opening rates and uniform deposition of light emitting layers, leading to issues such as shadowing and deposition defects.
Innovation Solution
A deposition apparatus and mask design featuring a frame with welding grooves for stable mask placement, a multi-layered mask structure with inclined openings, and a magnetic plate for secure substrate alignment, enhancing deposition efficiency and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional mask structure is used, then the manufacturing process is simple, but the opening rate is low and shadowing defects occur
Solution Approach 1:
The mask is divided into multiple layers (first mask layer, second mask layer, third mask layer) with each layer containing openings at different positions and sizes. This segmentation allows the deposition material to reach the substrate through multiple pathways, increasing the overall opening rate from a single layer perspective while maintaining precise control over deposition patterns.
Solution Approach 2:
The invention transitions from a two-dimensional single-layer mask to a three-dimensional multi-layer mask structure. The layers are stacked vertically with openings at different heights and positions, creating a complex 3D architecture that increases the effective opening area while reducing shadowing effects that occur in planar masks.
2Reliability
If a single-layer mask is used, then the device structure is simple, but shadowing defects occur during deposition
Solution Approach 1:
The mask is divided into multiple layers (first mask layer, second mask layer, third mask layer) with each layer containing openings at different positions and sizes. This segmentation allows the deposition material to reach the substrate through multiple pathways, increasing the overall opening rate from a single layer perspective while maintaining precise control over deposition patterns.
Solution Approach 2:
The multiple mask layers act as intermediaries that progressively guide and distribute the deposition material. Each layer modifies the material flow from the previous layer, ensuring uniform distribution across the substrate while preventing direct line-of-sight shadowing that would occur with a single layer.
3Manufacturing precision
If the mask openings are small, then the deposition precision is high, but the opening rate decreases
Solution Approach 1:
The mask is divided into multiple layers (first mask layer, second mask layer, third mask layer) with each layer containing openings at different positions and sizes. This segmentation allows the deposition material to reach the substrate through multiple pathways, increasing the overall opening rate from a single layer perspective while maintaining precise control over deposition patterns.
Solution Approach 2:
The invention merges multiple small openings across different layers to create an equivalent effect of a larger opening rate. While each individual opening remains small for precision, the cumulative effect of multiple openings in the multi-layer structure achieves high overall opening rates without sacrificing deposition precision.
Data Source
AI summary
A deposition apparatus includes a chamber, a deposition source disposed in the chamber, a mask assembly, and a base substrate disposed on the mask assembly. The mask assembly includes a frame including frame openings, a mask disposed on the frame and including deposition holes, and a welding stick disposed on the mask. A welding groove is disposed along an edge of the frame and has a depth in the thickness direction of the frame. The welding stick overlaps the welding groove.