Multi-Layer Prober Housing with Divided Frames for Vibration Isolation

Solution Overview

Problem

Existing multi-layer probers experience vibration propagation through integrated frames, leading to reduced alignment accuracy and inspection throughput due to increased installation area and device cost when multiple probes are stacked.

Innovation Solution

A housing with a divided frame structure, featuring separate side frames for supporting the floor base and measuring parts, reduces vibration propagation by isolating layers, maintaining alignment accuracy and throughput.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple measuring parts are stacked in multiple stages to improve throughput, then inspection throughput is improved, but vibration propagates through integrated frames reducing alignment accuracy

Engineering Contradiction:

Improveinspection throughputVSAvoidalignment accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The housing is divided into a plurality of independent frames, each frame corresponding to a different layer. This segmentation isolates the vibration of each layer, preventing vibration propagation between layers while maintaining the multi-layer structure for high throughput inspection.

Inventive Principle:

Principle #1Segmentation

2Device complexity

If an integrated housing structure is used to reduce device complexity, then device complexity is reduced, but vibration propagates across layers affecting measurement precision

Engineering Contradiction:

Improvehousing structure complexityVSAvoidalignment accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The housing is divided into a plurality of independent frames, each frame corresponding to a different layer. This segmentation isolates the vibration of each layer, preventing vibration propagation between layers while maintaining the multi-layer structure for high throughput inspection.

Inventive Principle:

Principle #1Segmentation

3Measurement precision

If probes are brought into close contact with electrode pads for electrical inspection, then measurement precision is improved, but allowable alignment error becomes smaller requiring higher positional accuracy

Engineering Contradiction:

Improveelectrical inspection accuracyVSAvoidalignment accuracy

Core Design Contradiction:

Measurement precisionVSManufacturing precision

Solution Approach 1:

The housing is divided into a plurality of independent frames, each frame corresponding to a different layer. This segmentation isolates the vibration of each layer, preventing vibration propagation between layers while maintaining the multi-layer structure for high throughput inspection.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS12399215B2Housing and prober

Publication Date: 2025.08.26 TOKYO SEIMITSU CO LTD

AI summary

A housing for a prober having a multi-layer structure in which measuring parts are stacked includes: floor bases configured to floor surfaces of respective layers of the multi-layer structure; and at least one side frame body which is arranged between a floor base of one layer and a floor base of another layer positioned above the one layer among the plurality of layers, and which is positioned in both side parts of the measuring parts, wherein the side frame body includes: a first side frame which is erected on the floor base of the one layer and which supports a lower surface side of the floor base of the another layer; and a second side frame which is erected on the floor base of the one layer at a position different from that of the first side frame, and supports a measuring part constituent member arranged in the measuring part.