Multi-Layer Sintered Metal Filters for Supercritical CO2

Solution Overview

Problem

Developing filtering equipment for supercritical fluids is challenging due to the need for durability at high pressures and temperatures, while maintaining a small size and preventing chemical incompatibility and structural damage, particularly for filtering supercritical carbon dioxide in semiconductor manufacturing.

Innovation Solution

A porous sintered metal body with multiple layers, comprising a first layer of coarse metal particles and a second layer of a blend of coarse, fine, and metal fiber particles, designed to withstand high pressures and temperatures, ensuring structural integrity and effective filtration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a filter membrane is designed to withstand high pressure and temperature for filtering supercritical fluids, then durability and reliability are improved, but the filter may become more prone to chemical incompatibility and structural damage

Engineering Contradiction:

Improvedurability at high pressure and temperatureVSAvoidchemical incompatibility and structural damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The filter membrane is divided into multiple layers with different functions: a support layer for structural integrity and a filtration layer for particle removal. This segmentation allows each layer to be optimized for its specific function, with the support layer providing mechanical strength to withstand high pressure and temperature, while the filtration layer performs the actual filtering without being exposed to the full stress conditions

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The filter membrane uses composite material structure combining different metal particles (coarse and fine particles) in distinct layers. The coarse particles in the support layer provide structural stability, while fine particles in the filtration layer enable effective particle removal. This composite approach allows the filter to simultaneously achieve durability under extreme conditions and effective filtration performance

Inventive Principle:

Principle #40Composite materials

2Strength

If the filter membrane is made stronger to withstand high pressure, then durability is improved, but the filter size and complexity increase

Engineering Contradiction:

Improveresistance to high pressureVSAvoidfilter structure complexity

Core Design Contradiction:

StrengthVSDevice complexity

Solution Approach 1:

The filter membrane is divided into multiple layers with different functions: a support layer for structural integrity and a filtration layer for particle removal. This segmentation allows each layer to be optimized for its specific function, with the support layer providing mechanical strength to withstand high pressure and temperature, while the filtration layer performs the actual filtering without being exposed to the full stress conditions

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the filter membrane have different properties optimized for their specific functions. The support layer has coarse particles with high porosity for structural integrity, while the filtration layer has fine particles for effective particle removal. This local differentiation allows the filter to achieve high strength where needed without increasing overall complexity

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If the filter membrane uses fine particles for effective filtration, then filtration efficiency is improved, but the structural integrity and durability decrease

Engineering Contradiction:

Improvefiltration efficiencyVSAvoidstructural integrity

Core Design Contradiction:

Manufacturing precisionVSStrength

Solution Approach 1:

The filter membrane is divided into multiple layers with different functions: a support layer for structural integrity and a filtration layer for particle removal. This segmentation allows each layer to be optimized for its specific function, with the support layer providing mechanical strength to withstand high pressure and temperature, while the filtration layer performs the actual filtering without being exposed to the full stress conditions

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The filter membrane uses composite material structure combining different metal particles (coarse and fine particles) in distinct layers. The coarse particles in the support layer provide structural stability, while fine particles in the filtration layer enable effective particle removal. This composite approach allows the filter to simultaneously achieve durability under extreme conditions and effective filtration performance

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-layer structure provides enhanced strength and filtration efficiency, effectively removing impurities from supercritical fluids like carbon dioxide, even at extreme conditions, with improved durability and reduced risk of structural failure.

Implementation Method 1

porous sintered metal bodies that include multiple layers made from different metal particles, that may be useful as filter membranes

Methodology Applied

Scientific EffectPorous filtration: Filter (physical)

Implementation Method 2

porous, sintered metal bodies

Methodology Applied

Scientific EffectSintering: Sintering

Data Source

PatentUS12409421B2Sintered porous body with multiple layers

Publication Date: 2025.09.09 ENTEGRIS INC

AI summary

Described are porous, sintered metal bodies that include multiple layers made from different metal particles and that may be useful as porous filter membranes, as well as methods of making and using the porous, sintered metal bodies.