3D Multi-Layer Silicon Waveguide Optical Coupler

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Solution Overview

Problem

Existing optical coupling technologies face challenges in achieving high alignment tolerance and manufacturing process constraints while maintaining high optical coupling efficiency and low power loss.

Innovation Solution

A three-dimensional (3D) multi-layer silicon waveguide optical coupler with a symmetric multi-layer structure, utilizing silicon nitride as the waveguide core and silicon dioxide as the cladding, which allows for improved vertical and horizontal alignment tolerance and reduced manufacturing constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional optical coupling technologies are used, then manufacturing process constraints are reduced, but alignment tolerance and optical coupling efficiency deteriorate

Engineering Contradiction:
Improvealignment toleranceVSAvoidmanufacturing process constraints
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent transitions from conventional planar waveguide structures to a three-dimensional multi-layer stacked configuration. This vertical stacking arrangement in the third dimension enables improved alignment tolerance by distributing alignment requirements across multiple layers, while the symmetric structure provides manufacturing advantages through repeated patterning processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The waveguide structure is divided into multiple discrete layers (first waveguide layer, second waveguide layer, third waveguide layer) separated by dielectric materials. This segmentation allows each layer to be independently optimized and manufactured, reducing overall manufacturing constraints while maintaining precise alignment through the stacked architecture.

Inventive Principle:
Principle #1Segmentation

2Loss of energy

If conventional waveguide structures are used, then manufacturing constraints are easier to satisfy, but optical coupling efficiency and power loss performance deteriorate

Engineering Contradiction:
Improvepower lossVSAvoidmanufacturing process constraints
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The patent employs a composite structure combining silicon nitride waveguide layers with silicon dioxide dielectric layers. This composite material system provides low optical loss through the high-index-contrast silicon nitride cores while the silicon dioxide layers provide mechanical support and electrical isolation, achieving low power loss without excessive manufacturing complexity.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

By stacking multiple waveguide layers vertically, the patent creates a three-dimensional light guiding structure that reduces power loss through improved mode confinement and reduced scattering, while the symmetric design simplifies manufacturing by allowing repeated use of the same patterning processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If simple waveguide structures are used, then manufacturing is easier, but optical coupling efficiency deteriorates

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidwaveguide structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent introduces vertical stacking in the third dimension to create multiple waveguide layers that work together to improve optical coupling efficiency. The symmetric multi-layer structure provides reliable mode matching and reduced scattering, while the regular pattern allows the complexity to be managed through standardized manufacturing processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The waveguide layers are pre-positioned in a symmetric stacked configuration during manufacturing, with precise spacing and alignment established in advance. This preliminary arrangement ensures high optical coupling efficiency is achieved without requiring complex real-time adjustments or sophisticated control systems during operation.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The 3D multi-layer waveguide design enhances optical coupling efficiency by effectively funneling light energy into the waveguide core, reducing power loss, and improving alignment tolerance, making it suitable for photonic platforms and integrated optical circuits.

Implementation Method 1

a first waveguide core layer, a second waveguide core layer arranged over the first waveguide core layer, a third waveguide core layer arranged over the second waveguide core layer, a fourth waveguide core layer arranged over the third waveguide core layer and a fifth waveguide core layer arranged over the fourth waveguide core layer

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

Light propagating within outer ones of the plurality of waveguide core layers is transmitted to and/or toward an interior one of the plurality of waveguide core layers via evanescent coupling therebetween

Methodology Applied
Scientific EffectEvanescent coupling:

Data Source

PatentUS20250052961A1Multi-layer waveguide optical coupler
Publication Date: 2025.02.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250052961A1 patent drawing
  • US20250052961A1 patent drawing
  • US20250052961A1 patent drawing

AI summary

An optical coupler includes: a plurality of waveguide core layers that are (i) stacked vertically one over another, (ii) spaced apart vertically one from another and (iii) extending from a light receiving end of the optical coupler longitudinally through the optical coupler to a light output end of the optical coupler, wherein each of the plurality of waveguide core layers includes a plurality of distinct waveguide paths extending from the light receiving end of the optical coupler along a length of the optical coupler; and a cladding formed from a cladding material cladding material surrounding each of the plurality of waveguide core layers. Light propagating within outer ones of the plurality of waveguide core layers is directed toward an interior one of the plurality of waveguide core layers via evanescent coupling between adjacent ones of the plurality of waveguide core layers.