Multi-Level Getter Structure for Micro-Device Encapsulation
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Solution Overview
Problem
Existing getter structures for micro-devices face challenges in increasing pumping capacity without increasing bulk, especially in limited spaces, and maintaining mechanical stability, while also dealing with the reactivity of porous layers and complex production processes.
Innovation Solution
A multi-layer getter structure is proposed, where each layer of getter material is separated by a sacrificial material layer, allowing for increased surface area exposure through strategically placed openings, thereby enhancing gas absorption and adsorption capacity without compromising mechanical stability or requiring porous materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a single-layer getter structure is used, then the structure is simple and mechanically stable, but the gas absorption and adsorption capacity is limited
Solution Approach 1:
The getter structure is divided into multiple discrete layers (first layer, second layer, third layer) separated by sacrificial material layers. Each layer can be independently deposited and processed, allowing the total pumping capacity to be the sum of individual layer capacities while maintaining manufacturing simplicity through standardized repetitive processes.
Solution Approach 2:
Multiple getter layers are stacked vertically one on top of another, with each layer nested within the same footprint area. This vertical nesting multiplies the effective getter surface area exposed to the cavity atmosphere without increasing the lateral dimensions, achieving higher pumping capacity in a compact volume.
2Quantity of substance
If getter material is deposited to increase pumping capacity, then the gas absorption capacity increases, but the available space is limited in individual packaging applications
Solution Approach 1:
The solution transitions from a single-plane (2D) getter configuration to a multi-layer vertical (3D) configuration. By stacking getter layers in the vertical dimension while maintaining the same lateral footprint, the effective pumping surface area is multiplied without increasing the horizontal space occupation, enabling high pumping capacity in compact packaging volumes.
3Quantity of substance
If porous material is used to increase surface area, then the gas absorption capacity increases, but the material reactivity and mechanical stability decrease
Solution Approach 1:
The patent explicitly avoids using porous materials, instead employing dense solid getter layers. The multi-layer configuration with sacrificial material spacing provides the necessary surface area multiplication without compromising the mechanical integrity or chemical stability of the getter material, eliminating the reactivity issues associated with porous structures.
4Quantity of substance
If multiple getter layers are stacked to increase capacity, then the pumping capacity increases, but the mechanical stability and ease of manufacture may be compromised
Solution Approach 1:
Sacrificial material layers are deposited between getter layers during the fabrication process, serving as temporary spacers that define the spacing and mechanical support structure. These sacrificial layers are later removed through selective etching or release processes, leaving precisely spaced getter layers that maintain mechanical stability while maximizing pumping capacity. This preliminary structuring simplifies the overall manufacturing sequence.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly increases gas absorption and adsorption capacity by exposing multiple active faces of the getter material, achieving up to five times the capacity of a single-layer structure while maintaining mechanical stability and simplifying production processes.
Implementation Method 1
increases the gas absorption and/or adsorption capacity
Implementation Method 2
increases the gas absorption and/or adsorption capacity by exposing multiple active faces of the getter material
Data Source
Figure 1~3
Figure 4~7
Figure 8~12
AI summary
A getter structure (100) comprising at least: - a support (102); - a first layer (104) of getter material disposed on the support; - a second layer (106) of getter material such that the first layer of getter material is disposed between the support and the second layer of getter material; - a first portion of material (108) mechanically connecting a first face (116) of the second layer of getter material to a first face (114) of the first layer of getter material and forming at least a first space (110) between the first faces of the first and second layers of getter material allowing gas circulation between the first faces of the first and second layers of getter material; - a first opening (112) passing through at least the second layer of getter material and opening into the first space.