Multi-Level Substrate Handling for Higher Processing Throughput
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Solution Overview
Problem
Current substrate processing apparatuses have limited throughput, leading to increased costs and inefficiencies in substrate processing, particularly in handling and transferring substrates between different processing blocks.
Innovation Solution
The apparatus includes multiple substrate holders and transporters at varying height positions, with a control system that manages the transfer and reception of substrates between these holders and transporters, allowing for efficient replacement and processing of substrates, thereby improving throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single substrate holder and single transporter are used, then the device complexity is low, but the throughput is limited
Solution Approach 1:
The substrate processing system is divided into multiple independent holder-transporter pairs operating at different height levels. Each pair can process substrates independently and simultaneously, transforming a single sequential processing path into multiple parallel paths, thereby increasing throughput without requiring a single overly complex centralized system
Solution Approach 2:
The system transitions from a single-plane substrate processing architecture to a multi-level three-dimensional architecture with holders and transporters at different height positions. This vertical dimensionality allows simultaneous substrate processing at multiple levels, effectively increasing throughput while distributing system complexity across separate spatial zones
2Productivity
If multiple substrate holders and transporters at different heights are used, then the throughput is improved, but the device complexity increases
Solution Approach 1:
Multiple holder-transporter systems at different height levels are merged into a single integrated substrate processing apparatus. The control unit coordinates all components across levels, allowing them to function as unified parallel processing units rather than separate systems, thereby achieving throughput improvement while managing complexity through integration
Solution Approach 2:
Each holder-transporter pair is designed with universal functionality to handle substrates of various types and perform multiple operations. This multi-functionality allows the same structural components to serve different purposes across height levels, reducing the need for specialized components and thereby controlling device complexity while maintaining high throughput
3Loss of time
If substrates are transferred sequentially between holders and transporters, then the device complexity is low, but the loss of time increases
Solution Approach 1:
The multi-level holder-transporter system enables continuous substrate processing by eliminating idle waiting periods. While one holder-transporter pair is transferring substrates, other pairs simultaneously perform processing operations, ensuring that useful actions continue uninterrupted across the entire system, thereby reducing total processing time without requiring overly complex coordination mechanisms
Data Source
AI summary
A substrate processing apparatus includes a substrate processor and a substrate transporter. The substrate processor includes an upper holding device and a lower holding device configured to be capable of holding a substrate. In the substrate processor, the lower holding device is provided below the upper holding device. Therefore, a height position at which a substrate can be held by the upper holding device is different from a height position at which the substrate can be held by the lower holding device. The substrate transporter has first and second hands that hold a substrate. The second hand is located farther downwardly than the first hand. A substrate is received from or transferred to the upper holding device by the first hand. A substrate is received from or transferred to the lower holding device by the second hand.