Multi-Level Optical Waveguide Vertical Interconnect
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Solution Overview
Problem
Existing optoelectronic structures with single-level optical waveguides are inefficient and costly for communicating light signals between optical devices at different levels on a chip, as they only allow communication between devices on the same horizontal plane.
Innovation Solution
The development of optoelectronic structures with a multi-level optical waveguide comprising two discrete segments, where a first segment is formed on a first dielectric layer and a second segment extends from the first level to a higher second level, using a trench in a second dielectric layer to create a continuous pathway, with both segments having a higher refractive index than the surrounding dielectric materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If single-level optical waveguides are used, then the structure is simple and manufacturing is easy, but light signals cannot be communicated between optical devices at different levels
Solution Approach 1:
The patent transitions from single-level (2D) waveguide structures to multi-level (3D) waveguide structures by incorporating vertical segments that extend between different horizontal planes. This dimensional change enables light signals to be communicated between optical devices at different levels on the chip, resolving the limitation of planar waveguides while maintaining manufacturing feasibility through established lithographic processes.
2Productivity
If multi-level optical waveguides are formed using conventional techniques, then communication between different levels is achieved, but the process is inefficient and costly
Solution Approach 1:
The waveguide is divided into discrete segments positioned at different levels, with each segment formed through separate lithographic and etching processes. The first waveguide segment is formed at a first level, and the second waveguide segment is formed at a second level, allowing each segment to be optimized and fabricated independently using standard semiconductor manufacturing techniques, thereby improving productivity and reducing costs.
Solution Approach 2:
The patent introduces an intermediary structure (the vertical connection between levels) that enables efficient light signal transmission between different horizontal planes. This intermediary mechanism allows the waveguide to transition between levels while maintaining optical coupling, achieving multi-level communication through a controlled intermediate transition rather than direct complex routing.
3Reliability
If waveguide segments have higher refractive index than surrounding materials, then light signal transmission is proper and efficient, but material selection and fabrication become more constrained
Solution Approach 1:
The patent utilizes refractive index contrast as a key parameter to ensure proper light signal transmission. By selecting materials with appropriate refractive indices (core material with higher refractive index than cladding material), the waveguide segments achieve efficient optical confinement and transmission. This parameter optimization is achieved through standard material deposition and deposition processes, balancing transmission quality with manufacturing feasibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient and cost-effective communication of light signals between optical devices at different levels on a chip, ensuring proper transmission by maintaining a higher refractive index for the waveguide segments, thus overcoming the limitations of single-level waveguides.
Implementation Method 1
Both the core and the cladding comprise light-transmissive materials (e.g., light-transmissive dielectric materials); however, the core material(s) have a refractive index that is higher than that of the cladding material(s) so that light signals received by the optical waveguide are confined to and propagated along the core
Data Source
AI summary
Disclosed are structures with an optical waveguide having a first segment at a first level and a second segment extending between the first level and a higher second level and further extending along the second level. Specifically, the waveguide comprises a first segment between first and second dielectric layers. The second dielectric layer has a trench, which extends through to the first dielectric layer and which has one side positioned laterally adjacent to an end of the first segment. The waveguide also comprises a second segment extending from the bottom of the trench on the side adjacent to the first segment up to and along the top surface of the second dielectric layer on the opposite side of the trench. A third dielectric layer covers the second segment in the trench and on the top surface of the second dielectric layer. Also disclosed are methods of forming such optoelectronic structures.