Multi-Lumen Dispensing Tip for Drip-Free Liquid Deposition
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Solution Overview
Problem
Conventional nozzles with a single larger lumen are insufficient in preventing drippage of liquids during acceleration in integrated circuit fabrication, as the surface tension is insufficient to retain the liquid within the nozzle after dispensation.
Innovation Solution
A nozzle design featuring multiple smaller lumens with a second cross-sectional area that produces a sufficient surface tension to prevent drippage, maintaining the net flow-capacity equivalent to a single larger lumen.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a single larger lumen is used in the nozzle, then the net flow-capacity is sufficient for liquid dispensation, but the surface tension is insufficient to prevent liquid drippage during acceleration
Solution Approach 1:
The single larger lumen is segmented into multiple smaller lumens. Each smaller lumen has a cross-sectional area sized to produce sufficient surface tension to prevent drippage, while the collective cross-sectional area of all smaller lumens maintains the net flow-capacity equivalent to the original single larger lumen.
2Reliability
If the lumen cross-sectional area is reduced to increase surface tension, then liquid drippage is prevented, but the net flow-capacity decreases
Solution Approach 1:
Instead of using a single small lumen that would provide sufficient surface tension but reduce overall flow-capacity, the invention segments the flow path into multiple smaller lumens. The sum of their cross-sectional areas equals or exceeds the original single lumen area, maintaining flow-capacity while each individual small lumen generates adequate surface tension to prevent drippage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The nozzle effectively prevents liquid drippage during acceleration by increasing surface tension, ensuring consistent dispensation and process integrity in integrated circuit fabrication.
Implementation Method 1
each smaller lumen produces a second surface tension of the liquid which is sufficient to substantially prevent drippage of the liquid when the smaller lumen is subjected to acceleration
Data Source
AI summary
A system for dispensing a liquid includes a conduit, the conduit being configured to convey the liquid; a dispensing tip fluidically coupled to the conduit; and a movable arm, the movable arm being configured to change a position of the dispensing tip relative to a workpiece to which the liquid is dispensed. The dispensing tip includes a first section having a liquid-containing wall and a septum, the septum divides the first section into at least a first liquid passage and a second liquid passage, and the septum is disposed to contact the liquid in each of the at least first liquid passage and second liquid passage during dispensing of the liquid to the workpiece.