Multi-Lumen Nozzle Assembly for Drip-Free Liquid Dispensing
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Solution Overview
Problem
Existing nozzles used for dispensing liquids onto semiconductor wafers during integrated circuit fabrication face issues with liquid drippage due to insufficient surface tension when subjected to acceleration after dispensation, as they have a single larger lumen with a first cross-sectional area that is not sufficient to prevent drippage.
Innovation Solution
A nozzle design featuring multiple smaller lumens with a second cross-sectional area that produces a sufficient surface tension to prevent drippage, with each lumen having a net flow-capacity equivalent to the original single lumen, ensuring that liquid is retained even during movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a single larger lumen is used in the nozzle, then the flow-capacity is sufficient for dispensing liquid, but the surface tension is insufficient to prevent liquid drippage during acceleration
Solution Approach 1:
The single larger lumen is divided into multiple smaller lumens. Each smaller lumen has a cross-sectional area that produces sufficient surface tension to prevent drippage, while the combined cross-sectional areas of all smaller lumens maintain the original flow-capacity equivalent to the single larger lumen.
2Reliability
If the lumen cross-sectional area is reduced to increase surface tension, then liquid drippage is prevented, but the flow-capacity is reduced
Solution Approach 1:
Instead of using a single small lumen that would reduce flow-capacity, the invention segments the flow path into multiple small lumens. The cumulative cross-sectional area of all smaller lumens equals the original single lumen area, maintaining flow-capacity while each individual small lumen generates sufficient surface tension.
3Reliability
If multiple smaller lumens are used to prevent drippage, then liquid retention is improved, but the device complexity increases
Solution Approach 1:
The nozzle internal structure is segmented into multiple lumens separated by partitions. This segmentation is achieved through precision manufacturing techniques that create the multi-lumen structure within the nozzle body, allowing complex internal geometry to be integrated into a single component.
Solution Approach 2:
The multiple lumens are arranged concentrically or in a nested pattern within the nozzle cross-section, with partitions separating the flow paths. This nesting approach maximizes the use of internal space while maintaining a compact external nozzle geometry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The multi-lumen nozzle design effectively prevents liquid drippage during acceleration, maintaining the original flow-capacity and ensuring consistent dispensation, which is crucial for precise semiconductor fabrication processes.
Implementation Method 1
each smaller lumen produces a second surface tension of the liquid which is sufficient to substantially prevent drippage of the liquid when the smaller lumen is subjected to acceleration after the dispensation ends
Data Source
AI summary
A nozzle assembly for use in liquid-dispensing system, the nozzle assembly includes a pipe having lumens; a body, an end of the pipe being mounted to the body; the pipe having a wall and a septum, the wall enclosing a space, the septum dividing the space enclosed by the wall into the lumens; each of the lumens being correspondingly terminated in an orifice such that a liquid is escapable from each lumen through the corresponding orifice and is thereby dispensable from the nozzle assembly.