Multi-Mirror Laser Sustained Plasma Light Source Collection

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Solution Overview

Problem

Conventional laser sustained plasma (LSP) broadband light sources have low collection efficiency due to large collection polar angles and solid angles, resulting in a larger focused spot size and inefficient use of broadband radiation.

Innovation Solution

A multi-mirror LSP broadband light source configuration with additional reflector elements positioned opposite the primary reflector, increasing the total collection solid angle from 3π to 4π, allowing for recycling of unabsorbed pump illumination and broadband light back to the plasma, thereby enhancing heating efficiency and reducing the focused spot size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a single elliptical mirror is used to collect broadband light from plasma, then the light collection covers a polar angle of 120 degrees, but the collection solid angle remains low (less than 3π) and the focused spot size is larger than ideal

Engineering Contradiction:
Improvecollection solid angleVSAvoidcollection efficiency
Core Design Contradiction:
Area of stationary objectVSLoss of energy

Solution Approach 1:

The light collection system is divided into multiple independent reflector elements (first reflector element, second reflector element, third reflector element) that each collect light from different solid angle regions. The first reflector collects from 2π to 4π, the second from 0 to 2π, and the third from 0 to π, together achieving near 4π coverage and resolving the limitation of single-mirror geometry

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a single-planar or simple curved mirror approach to a three-dimensional arrangement of multiple reflector elements positioned at different spatial locations and orientations. This multi-dimensional configuration enables coverage of the entire 4π solid angle around the plasma source, fundamentally expanding the collection capability beyond what a single elliptical mirror can achieve

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Illumination intensity

If the collection polar angle is increased to 120 degrees, then more light appears to be collected, but the focused spot size becomes larger and collection efficiency decreases

Engineering Contradiction:
Improvebroadband light collectionVSAvoidfocused spot size
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

Each reflector element is designed with specific geometric parameters (radii of curvature, positions) optimized for its particular collection region. The first reflector element focuses light from 2π to 4π, the second from 0 to 2π, and the third from 0 to π, with each element producing a tightly focused spot appropriate for its collection angle, thereby maintaining small spot sizes while achieving comprehensive coverage

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each reflector element is tailored with local optical properties and geometric characteristics optimized for its specific function and collection region. The reflectors have different radii of curvature and positioning to match their respective collection solid angles, ensuring that each local region contributes optimally to the overall system performance with appropriately sized focused spots

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases collection efficiency by up to 1.5 times with the same laser power, achieving a higher collection solid angle and improving the overall performance of the light source.

Implementation Method 1

a pump source configured to generate pump illumination... directing a portion of the pump illumination into the gas in a gas containment structure to sustain a plasma

Methodology Applied
Scientific EffectIonization: Ionisation

Implementation Method 2

unabsorbed pump illumination... back to the plasma

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 3

a first reflector element configured to direct a portion of the pump illumination into the gas... one or more additional reflector elements are configured to reflect unabsorbed pump illumination and broadband light uncollected by the first reflector element back to the plasma

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

broadband light emitted from the plasma

Methodology Applied
Scientific EffectThermal Radiation: Thermal Radiation

Implementation Method 5

broadband light emitted from the plasma

Methodology Applied
Scientific EffectLuminescence: Luminescence

Data Source

PatentUS10811158B1Multi-mirror laser sustained plasma light source
Publication Date: 2020.10.20 KLA CORP
  • US10811158B1 patent drawing
  • US10811158B1 patent drawing
  • US10811158B1 patent drawing

AI summary

A multi-mirror laser sustained plasma broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source includes a pump source configured to generate pump illumination and a first reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The first reflector is configured to collect a portion of broadband light emitted from the plasma. The light source also includes one or more additional reflector elements positioned opposite of the first reflector. The one or more additional reflector elements are configured to reflect unabsorbed pump illumination and broadband light uncollected by the first reflector element back to the plasma.