Multi-Mode Coriolis Gyroscope Resonator with 32 Electrodes

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Solution Overview

Problem

MEMS gyroscopes face limitations in both resolution and range due to the constraints of analog-to-digital converters, and are sensitive to environmental factors like temperature and vibration, making them unsuitable for high-performance applications in weapon, space, and vehicle systems.

Innovation Solution

A Coriolis Vibratory Gyroscope (CVG) with a resonator exhibiting N-fold rotational symmetry, where N is a power of 2, and featuring 16 pairs of differential electrodes around its perimeter, capable of oscillating along n=1 and n=2 modes, with a control circuit that maintains phase differences and uses coarse sensitivity measurements as a bias for higher sensitivity readings, allowing for both high resolution and range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If a gyroscope is designed to operate at high angular rates, then the range is improved, but the resolution deteriorates

Engineering Contradiction:
ImproverangeVSAvoidresolution
Core Design Contradiction:
Duration of action of stationary objectVSMeasurement precision

Solution Approach 1:

The gyroscope employs multiple resonant modes (n=1 and n=2 modes) segmented across different frequency ranges. The n=1 modes handle lower angular rates with high resolution, while the n=2 modes extend the measurement range to higher angular rates. This segmentation allows the system to achieve both high resolution and wide range simultaneously by assigning different modes to different operational regimes.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If known MEMS gyroscopes are used, then the cost and simplicity are improved, but the environmental sensitivity worsens

Engineering Contradiction:
Improvecost and simplicityVSAvoidenvironmental sensitivity
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The gyroscope utilizes a composite structure combining silicon resonator elements with specialized electrode configurations and multi-mode mechanical designs. This composite approach, while more complex than simple MEMS, provides enhanced environmental robustness through the synergistic combination of different structural components that collectively resist temperature and vibration effects better than conventional single-mode MEMS gyroscopes.

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If high-resolution ADC is used to improve resolution, then the measurement precision is improved, but the device complexity and cost worsen

Engineering Contradiction:
ImproveresolutionVSAvoidADC complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Instead of using a single high-resolution ADC, the system segments the measurement function across multiple resonant modes with different sensitivities. The n=1 modes provide high-resolution measurements for low angular rates, while n=2 modes cover higher rates. This segmentation allows the use of multiple lower-resolution ADCs or simpler conversion circuits, reducing overall system complexity and cost while maintaining high effective resolution through the multi-mode approach.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The CVG achieves a high resolution of 19 bits and a wide measurement range, reducing environmental sensitivity and enhancing performance in applications requiring precise angular rate detection.

Implementation Method 1

The Coriolis effect causes the vibrating object to for example exert a force on its support, and by measuring this force the rate of rotation can be determined.

Methodology Applied
Scientific EffectCoriolis effect: Coriolis Force

Implementation Method 2

a control circuit that maintains phase differences and uses coarse sensitivity measurements as a bias for higher sensitivity readings

Methodology Applied
Scientific EffectElectrostatic force: Electric Field

Data Source

PatentEP3665436B1A silicon multi-mode coriolis vibratory gyroscopes having high order rotationally symmetric mechanical structure and 32 electrodes
Publication Date: 2025.01.15 HRL LAB
  • EP3665436B1 patent drawingFigure 1
  • EP3665436B1 patent drawingFigure 2
  • EP3665436B1 patent drawingFigure 3

AI summary

An angular sensor, comprising a Coriolis vibratory gyroscope (CVG) resonator, capable of oscillating along a first pair of normal n=1 modes comprising a first normal mode and a second normal mode; and a second pair of normal n=2 modes comprising a third normal mode and a fourth normal mode; the sensor further comprising one drive electrode and one sense electrode aligned along an anti-nodal axis of each mode; and a pair of bias tune electrodes aligned with an anti-nodal axis of each mode if no drive and sense electrode pair is aligned with said anti-nodal axis.