Multi-nozzle Surface Measuring Device with Real-time Separation Distance Calculation
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Solution Overview
Problem
Existing surface measuring technologies are inefficient in measuring the shape of a measurement object at high speeds, as they often rely on single-point scanning methods that are slow and lack the capability to accurately calculate separation distances between sensors and the object surface in real-time.
Innovation Solution
A surface measuring device comprising a stage, a sensor unit with multiple air sensors and nozzles, and a control unit that supplies gas and calculates separation distances based on flow rates measured by air sensors, allowing for simultaneous scanning and data acquisition across the entire surface, thereby increasing measurement speed and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single-point scanning method is used to measure surface shape, then measurement precision can be maintained, but measurement speed is slow
Solution Approach 1:
The patent divides the measurement system into multiple air sensors (first to N-th air sensors) arranged in a row, each independently measuring the separation distance at different positions. This segmentation allows simultaneous measurement of multiple points across the surface, transforming a slow single-point scanning process into a parallel multi-point measurement system that maintains precision while dramatically increasing measurement speed.
2Productivity
If multiple air sensors are used to increase measurement speed, then productivity improves, but device complexity increases
Solution Approach 1:
The patent combines multiple air sensors with corresponding nozzles into a single integrated sensor unit that moves together as one assembly. The base portion holds all air sensors and nozzles in fixed spatial relationships, allowing the system to maintain multiple measurement points simultaneously while managing device complexity through unified structural integration rather than separate independent components.
3Measurement precision
If real-time separation distance calculation is implemented, then measurement accuracy improves, but processing complexity increases
Solution Approach 1:
The control unit receives flow rate information from all air sensors in real-time during scanning and dynamically calculates separation distances based on this feedback. This allows the system to maintain high measurement accuracy by continuously adjusting for variations in nozzle-to-surface distance, while the automated computational process manages processing complexity through algorithmic rather than mechanical solutions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the measurement of the surface shape of a measurement object at a significantly higher speed by utilizing multiple air sensors to calculate separation distances and adjust scanning parameters in real-time, improving response speed and accuracy while allowing for immediate processing of measurement data.
Implementation Method 1
first to N-th air sensors each configured to measure a flow rate of the gas supplied from the supply unit when the gas flows through an internal flow path
Data Source
AI summary
A surface measuring device includes a stage, a sensor unit, a supply unit, and a control unit. The control unit is configured to execute first processing of operating the supply unit such that gas that has flowed through an internal flow paths is blown downward from blow-out holes of first to N-th nozzles, second processing of operating at least one of the stage and the sensor unit such that the sensor unit scans a surface of a measurement object during operation of the supply unit by the first processing, and third processing of calculating a separation distance between each of the first to N-th nozzles and the surface of the measurement object based on a flow rate of the gas measured in each of first to N-th air sensors during scanning of the sensor unit by the second processing.