Multi-Optical Positioning for Precise Irradiation Processing
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Solution Overview
Problem
Existing processing systems face challenges in accurately measuring the position of objects and irradiation apparatuses, particularly when using multiple optical elements and movement systems, leading to inefficiencies in processing operations.
Innovation Solution
A processing system that includes an irradiation apparatus with a terminal optical element, a movement apparatus, and multiple measurement apparatuses to measure the position of both the object and the irradiation apparatus, utilizing different optical systems and light sources for precise positioning and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple measurement apparatuses are used to measure both object position and irradiation apparatus position, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The measurement function is segmented into three distinct measurement apparatuses, each dedicated to measuring specific positions: the first measures object position, the second measures irradiation apparatus position through the optical system, and the third measures irradiation apparatus position from an external location. This segmentation allows each apparatus to be optimized for its specific measurement task, improving overall measurement precision while maintaining manageable system complexity through functional specialization.
2Measurement precision
If position measurement of irradiation apparatus is performed from a position away from the apparatus, then measurement accuracy is improved, but the system requires additional spatial arrangement complexity
Solution Approach 1:
The third measurement apparatus measures the position of the irradiation apparatus from a location away from the apparatus by using the object or a reference mark as an intermediary. The measurement light is emitted toward the irradiation apparatus, and the position is determined based on the reflected or scattered light from the intermediary, enabling indirect measurement that improves accuracy while managing spatial complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the accuracy and efficiency of processing operations by enabling precise measurement and alignment of the irradiation apparatus and object, allowing for complex processing tasks such as surface modification and marking with high resolution.
Implementation Method 1
a third measurement apparatus that measures a position of the irradiation apparatus by emitting, from a position which is away from the irradiation apparatus, a measurement light toward the irradiation apparatus and detecting the measurement light
Data Source
AI summary
A processing system, which processes an object by irradiating the object with a processing light through an irradiation optical system, includes: an irradiation apparatus including at least a terminal optical element of the irradiation optical system; a movement apparatus that moves the irradiation apparatus; a first measurement apparatus that is disposed at the irradiation apparatus and measures a position of the object; a second measurement apparatus that measures the position of the object through at least the terminal optical element; and a third measurement apparatus that emits, from a position which is away from the irradiation apparatus, a measurement light toward the irradiation apparatus and measures the position of the irradiation apparatus by detecting the measurement light.