Multi-Passage Nozzle Assembly for Uniform Thin-Film Deposition
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Solution Overview
Problem
Existing deposition processes struggle to achieve uniform thickness of thin films on substrates due to non-uniform gas ejection, particularly as substrate sizes increase, leading to inconsistencies in film deposition.
Innovation Solution
The deposition apparatus incorporates a nozzle assembly with a unique passage design, including multiple passages and connections that facilitate uniform gas diffusion and ejection across the substrate, ensuring consistent film thickness regardless of substrate size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional single passage design is used for gas ejection, then the device structure is simple, but the gas distribution becomes non-uniform on large substrates
Solution Approach 1:
The single gas passage is segmented into multiple passages (first passage, second passage, third passage) that are spatially distributed across the electrode part. Each passage independently supplies gas to different regions, enabling uniform gas distribution over large substrate areas while maintaining manageable structural complexity through modular passage design.
Solution Approach 2:
Different passages are positioned at specific locations (edge region and center region) to provide locally optimized gas supply. The first passage supplies gas to the edge region while the second and third passages supply gas to the center region, ensuring that each area receives appropriate gas flow for uniform thin film deposition.
2Area of stationary object
If the substrate size is increased to meet display device requirements, then the production capacity is improved, but the gas ejection uniformity deteriorates
Solution Approach 1:
The gas supply system is segmented into multiple passages distributed across the electrode part to match the large substrate area. This segmentation allows gas to be delivered uniformly across the entire large substrate surface, preventing the non-uniformity that would otherwise occur with a single passage design.
Solution Approach 2:
The passage arrangement transitions from a single-dimensional linear supply to a two-dimensional distributed network across the electrode part. The passages are arranged in specific patterns (edge region and center region) to achieve uniform gas coverage across the large substrate area, effectively adding a spatial dimension to the gas distribution strategy.
3Manufacturing precision
If multiple passages and connection passages are added to achieve uniform gas distribution, then the deposition precision is improved, but the device complexity increases
Solution Approach 1:
Multiple passages and connection passages are merged into an integrated nozzle assembly structure. The first passage, second passage, third passage, and their interconnections form a unified gas supply system that delivers uniform gas distribution while consolidating the structural complexity into a single manufacturable component.
Solution Approach 2:
The nozzle assembly with its multiple passages serves multiple functions simultaneously: it distributes gas to edge regions, center regions, and intermediate areas; it maintains uniform gas flow; and it supports large substrate processing. This multi-functionality justifies the increased structural complexity by delivering comprehensive gas distribution control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures uniform thin film deposition by uniformly distributing gas across larger substrates, enhancing deposition reliability and efficiency.
Implementation Method 1
depositing a process gas into a plasma state by applying a high voltage
Implementation Method 2
facilitate uniform gas diffusion and ejection across the substrate
Data Source
AI summary
Disclosed is a deposition apparatus including a stage, and a nozzle assembly disposed on the stage, and including an electrode part extending in a first direction and a nozzle part disposed under the electrode part. A passage is defined in the electrode part, the passage includes a main passage defined on an upper surface of the electrode part, and extending in a downward direction, a first passage extending from a lower portion of the main passage in the first direction, first connection passages extending in the downward direction from a (1-1)-th area and a (1-2)-th area being adjacent to opposite sides of the first passage, which are opposite in the first direction, and second passages extending in the first direction from lower portions of the first connection passages, and the nozzle part is disposed under the second passages.