Incremental Multi-Patterning Validation via Graph Segmentation
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Solution Overview
Problem
The validation of multi-patterning technology (MPT) designs requires significant computing resources and time due to the iterative process of checking and correcting errors, particularly in decomposing patterns into multiple colors, which is inefficient and resource-intensive.
Innovation Solution
A computer-implemented method that incrementally validates a multi-patterning layer by correcting errors and forming connected components, allowing for selective validation of portions of the design without validating the entire layer, using graph theory to identify articulation points and cut shapes, thereby reducing the computational burden.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If iterative validation of the entire multi-patterning layer is performed, then design correctness is ensured, but computing resources and time are excessively consumed
Solution Approach 1:
The validation process is segmented into incremental steps rather than validating the entire layer at once. The method divides the multi-patterning layer into multiple portions and validates them sequentially, allowing early termination when errors are detected. This segmentation reduces the total validation time while maintaining design correctness by ensuring each segment is properly validated before proceeding.
Solution Approach 2:
The method performs partial validation by only validating necessary portions of the multi-patterning layer. When an error is detected in a particular segment, the validation can be terminated early without examining the entire layer. This partial action approach significantly reduces computing resources and time consumption while still ensuring design correctness for the affected portions.
2Reliability
If iterative validation of the entire multi-patterning layer is performed, then design correctness is ensured, but computing resources are excessively consumed
Solution Approach 1:
The validation process is divided into smaller incremental segments that can be processed separately. By validating portions of the multi-patterning layer sequentially rather than all at once, the computing resources required at any given moment are reduced, while the cumulative validation ensures design correctness is maintained.
Solution Approach 2:
The method performs only the necessary partial validation required to detect errors. When validation of a segment reveals an error, the process can terminate early without consuming additional computing resources on the remaining portions. This partial action significantly reduces overall computing resource consumption while maintaining reliability.
3Manufacturing precision
If multi-patterning technology is used to increase pattern density, then manufacturing capability is improved, but design rule complexity and validation difficulty increase
Solution Approach 1:
The complex multi-patterning design validation is segmented into manageable portions with specific design rules applied to each segment. This segmentation breaks down the overall complexity into smaller, more tractable problems that can be validated incrementally, making the complex design rules more manageable while maintaining the high pattern density capability.
Data Source
AI summary
A computer-implemented method for validating a design characterized by a multi-patterning layer is presented. The method includes receiving the multi-patterning layer in a memory of the computer when the computer is invoked to validate the design. The method further includes correcting, using the computer, a first error in a first shape of the multi-patterning layer in accordance with a first rule thereby forming a corrected layer. The method further includes incrementally validating, using the computer, a first portion of the corrected layer in accordance with the first error and a first connected component of a first graph associated with the multi-patterning layer.