Multi-Plenum Gas Manifold Layout for Compact Multi-Gas Distribution
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Solution Overview
Problem
Existing substrate processing systems face challenges in efficiently distributing and diverting multiple gas species due to limited space, leading to crowded and inefficient gas manifold arrangements.
Innovation Solution
The implementation of a multi-plenum gas manifold with concentric and/or radially offset cavities and channels, allowing for compact and centralized gas distribution and diversion, minimizing space occupation while supporting an increased number of plenums.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional gas manifold arrangements are used to distribute multiple gas species, then gas distribution function is provided, but space occupation increases and system becomes crowded
Solution Approach 1:
The patent implements nested plenums where a first plenum is positioned inside a second plenum, allowing multiple gas distribution pathways to occupy the same radial space. This nesting arrangement enables multiple gas species to be distributed through concentric cavities, significantly reducing the overall footprint of the manifold system while maintaining the ability to distribute multiple gases independently.
Solution Approach 2:
The patent transitions from traditional planar manifold arrangements to a three-dimensional concentric plenum structure. By utilizing radial and axial dimensions with multiple plenums at different heights and radii, the system distributes gases in multiple spatial dimensions, thereby reducing the horizontal space occupation while increasing gas distribution versatility.
2Adaptability or versatility
If multiple separate manifolds are used for different gas species, then gas distribution versatility is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple separate manifold functions into a single integrated multi-plenum structure. Different plenums within the same manifold body handle different gas species, combining what would traditionally require separate manifold assemblies. This integration reduces the number of discrete components while maintaining the ability to distribute multiple gas species independently through isolated plenum chambers.
Solution Approach 2:
The manifold body serves as a universal structure that accommodates multiple plenums for different gas species simultaneously. The single manifold assembly performs multiple gas distribution functions through its nested plenum configuration, making the system multi-functional without requiring separate specialized manifolds for each gas type.
3Area of stationary object
If compact manifold design is implemented to reduce space, then space utilization is improved, but gas flow efficiency may deteriorate
Solution Approach 1:
The patent segments the manifold into multiple independent plenums, each with its own cavity and channel system. This segmentation allows each plenum to be optimized for specific gas flow requirements while maintaining compact overall dimensions. The isolated channels within each plenum ensure efficient gas distribution without interference from other gas pathways, preserving flow efficiency despite reduced footprint.
Data Source
AI summary
A multi-plenum gas manifold is disclosed and includes a monolithic body, a first plenum and a second plenum. The first plenum is arranged within the monolithic body and configured to distribute to or divert from one or more substrate processing stations a first gas species. The first plenum includes a first cavity and a first set of channels extending outward from the first cavity. The second plenum is arranged within the monolithic body isolated from the first plenum and configured to distribute to or divert from the one or more substrate processing stations a second gas species. The second plenum includes a second cavity disposed radially outward of the first cavity. The second set of channels extends outward from the second cavity.