Multi-Point Temperature Measurement Using Optical Path Segmentation
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Solution Overview
Problem
Existing temperature measurement technologies using low coherence interferometers face difficulties in accurately identifying interference waveforms for multiple measurement points, leading to potential misdetection and inefficiencies when the number of measurement points increases.
Innovation Solution
A temperature measurement apparatus and method that employs a light source, splitters, a reference beam reflector, optical path length adjusters, and photodetectors to differentiate and adjust optical path lengths for each measurement beam, allowing for the storage and comparison of initial peak positions to accurately estimate temperatures at each measurement point.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the number of measurement points is increased to improve measurement coverage, then measurement completeness is improved, but the ability to identify which interference waveform corresponds to which measurement point deteriorates
Solution Approach 1:
The patent divides the measurement system into n separate measurement beams, each with a distinct optical path length from the second splitter to its corresponding measurement point. This segmentation allows each interference waveform to be uniquely identified by its optical path length characteristic, enabling accurate temperature measurement at multiple points simultaneously without confusion between waveforms.
Solution Approach 2:
The patent changes the optical path length parameter for each measurement beam individually. By setting different optical path lengths from the second splitter to each measurement point, the system creates unique interference patterns for each point, allowing the controller to identify and process waveforms correctly even when measuring many points simultaneously.
2Productivity
If multiple measurement beams are used to measure multiple points simultaneously to improve productivity, then measurement efficiency is improved, but the complexity of managing and identifying waveforms from each point increases
Solution Approach 1:
The patent segments the optical path into n distinct measurement beams, each with a unique optical path length from the second splitter to its measurement point. This segmentation allows the system to simultaneously measure n points while maintaining the ability to identify which waveform corresponds to which point through its unique optical path length signature.
Solution Approach 2:
The controller uses the known optical path length information as feedback to correctly associate each detected interference waveform with its corresponding measurement point. By comparing the measured optical path length against stored reference values, the system automatically identifies and processes each waveform correctly, managing complexity through systematic feedback.
3Measurement precision
If optical path lengths are made different for each measurement beam to improve waveform identification, then measurement accuracy is improved, but the complexity of adjusting and managing optical paths increases
Solution Approach 1:
The patent segments the optical measurement system into n distinct paths, each with a uniquely set optical path length from the second splitter to its measurement point. This segmentation enables accurate waveform identification while distributing the complexity across standardized, repeatable optical path configurations that can be systematically managed.
Solution Approach 2:
The patent systematically changes the optical path length parameter for each measurement beam to create unique identification signatures. By establishing predetermined, different optical path lengths for each beam, the system achieves accurate waveform identification while maintaining manageable complexity through consistent parameter differentiation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and efficient temperature detection across multiple measurement points, enhancing accuracy and processing efficiency in substrate processing applications.
Implementation Method 1
measuring an interference of reflected beams of the n number of measurement beams and a reflected beam of the reference beam
Data Source
AI summary
A temperature measuring apparatus includes a light source, a first splitter, a second splitter, a reference beam reflector, an optical path length adjuster, a reference beam transmitting member, a first to an nth measuring beam transmitting member and a photodetector. The temperature measuring apparatus further includes a controller that stores, as initial peak position data, positions of interference peaks respectively measured in advance by irradiating the first to the nth measuring beam onto the first to the nth measurement point of the temperature measurement object, and compares the initial peak position data to positions of interference peaks respectively measured during a temperature measurement to thereby estimate a temperature at each of the first to the nth measurement point.