Multi-Polarization Spatial Filter for Rapid Semiconductor Defect Detection
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Solution Overview
Problem
Current defect detection methods for semiconductor devices, particularly those with highly integrated patterns, face challenges in accurately detecting minute defects due to the need for adjusting illumination directions based on specific directivity, leading to prolonged detection times.
Innovation Solution
An apparatus and method utilizing straight polarized lights with different polarized directions, emitted by a light emitter and selectively passed through spatial filters, which are then condensed onto the object using an optical member, allowing for simultaneous detection of defects with improved signal-to-noise ratio and reduced detection time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If light is partially blocked by a spatial filter to improve defect detection for patterns with specific directivity, then detection accuracy is improved, but detection time increases because illumination direction must be changed for different directivities
Solution Approach 1:
The spatial filter is divided into multiple regions (first opening, second opening, third opening) with different polarizing directions. Each region processes light for a specific polarization direction simultaneously, eliminating the need to sequentially change illumination directions for different defect directivities.
Solution Approach 2:
The invention introduces polarization direction as an additional dimension for defect detection. By using light with different polarizing directions (e.g., first polarization direction, second polarization direction perpendicular to the first) simultaneously through different openings of the spatial filter, the system can detect defects with various directivities in parallel rather than sequentially.
2Adaptability or versatility
If multiple illumination directions are used to detect defects with different directivities, then comprehensive defect detection is achieved, but the detection process becomes too long
Solution Approach 1:
Multiple spatial filters with different polarizing characteristics are merged into a single integrated spatial filter structure. This allows simultaneous processing of light with different polarizing directions through different openings, achieving comprehensive defect detection coverage while maintaining high detection speed.
Solution Approach 2:
The system continuously illuminates the object with light containing multiple polarizing directions simultaneously through the multi-opening spatial filter, rather than sequentially switching between different illumination directions. This continuous multi-directional illumination maintains high detection speed while achieving comprehensive defect coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and rapid detection of defects in semiconductor devices by improving the signal-to-noise ratio and allowing for simultaneous detection of defects with different polarizations, thereby reducing the time required for inspection.
Implementation Method 1
a light emitter configured to emit straight polarized lights having different polarized directions
Implementation Method 2
a spatial filter having openings through which the straight polarized lights selectively pass
Implementation Method 3
a spatial filter having openings through which the straight polarized lights selectively pass
Implementation Method 4
an optical member configured to condense the straight polarized lights, which pass through the openings, on the object
Implementation Method 5
a light detector configured to detect lights reflected from the object
Data Source
AI summary
An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.