Multi-port Nozzle Unit for Substrate Liquid Treatment
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Solution Overview
Problem
Existing liquid treatment devices for substrates, such as those used in semiconductor and flat display panel manufacturing, face challenges in efficiently utilizing a limited number of nozzles to supply various types of developing solutions, leading to the need for multiple devices and increased risk of device breakdown.
Innovation Solution
A substrate treatment apparatus with a nozzle unit that includes multiple discharge ports for different treatment liquids, allowing for simultaneous supply of treatment liquids in both stream and liquid curtain modes, and a controller to optimize nozzle movement and discharge direction, enabling efficient use of limited nozzle space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple nozzles are increased to supply various treatment liquids, then the capability to supply different liquids is improved, but the device complexity increases and the risk of breakdown increases
Solution Approach 1:
The patent implements a single nozzle unit that can supply multiple types of treatment liquids (developing solution, rinse liquid, drying liquid) by switching between different discharge ports. This multi-functional nozzle design eliminates the need for separate nozzles for each liquid type, thereby reducing device complexity while maintaining the capability to supply various treatment liquids.
Solution Approach 2:
The nozzle unit is designed to be movable along the substrate width direction, allowing dynamic adjustment of the discharge position. This dynamic capability enables a single nozzle to serve multiple functions by positioning itself appropriately for different liquid supply modes (stream manner at center, liquid curtain manner at moved positions), resolving the contradiction between versatility and complexity.
2Adaptability or versatility
If multiple nozzles are increased to supply various treatment liquids, then the capability to supply different liquids is improved, but the reliability decreases due to frequent breakdown
Solution Approach 1:
By designing a single nozzle unit that can supply multiple treatment liquids through different discharge ports and operational modes, the patent reduces the total number of nozzles in the system. Fewer nozzles mean fewer potential failure points, thereby improving reliability while maintaining the versatility to supply different liquids.
Solution Approach 2:
The patent merges the functions of multiple nozzles (developing solution nozzle, rinse liquid nozzle, drying nozzle) into a single integrated nozzle unit. This consolidation reduces the number of components that can fail, improving overall system reliability while preserving the capability to supply various treatment liquids.
3Adaptability or versatility
If the internal space is narrowed to accommodate more nozzles, then the capability to supply different liquids is improved, but the device complexity increases
Solution Approach 1:
The movable nozzle unit allows the system to accommodate multiple liquid supply functions within a compact space by dynamically repositioning the nozzle along the substrate width. This eliminates the need for complex fixed arrangements of multiple nozzles, reducing device complexity while maintaining versatility.
Data Source
AI summary
An apparatus and a method for performing liquid treatment with respect to a substrate are provided. The apparatus includes a substrate supporting unit that supports and rotates the substrate, and a liquid supplying unit that supplies a liquid onto the substrate supported by the substrate supporting unit. The liquid supplying unit includes a nozzle unit that supplies a first treatment liquid and a second treatment liquid, and a moving unit that moves the nozzle unit. The nozzle unit has a first slit discharge port for discharging the first treatment liquid in a liquid curtain manner, a second slit discharge port for discharging the second treatment liquid in the liquid curtain manner, and a wetting liquid discharge port for discharging a pre-wetting liquid. The treatment liquids are selectively supplied depending on films formed on the substrate, thereby easily coping with the substrate having various types of films.