Multi-probe FD-OCT Gauge for Slab Thickness
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Solution Overview
Problem
Existing frequency-domain optical coherence tomography (FD-OCT) probes face limitations in throughput due to slow data-acquisition speed and failure to account for vibrations during slab characterization, particularly in ultra-thin slabs.
Innovation Solution
A system employing multiple synchronized FD-OCT probes with a centralized actuation mechanism for simultaneous irradiation and detection, coupled with a spectral-analysis module to analyze interference patterns for determining slab thickness and topography, effectively mitigating the influence of vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple FD-OCT probes are used for slab characterization, then measurement throughput is improved, but data-acquisition speed is limited by independent operation of probes
Solution Approach 1:
The patent combines multiple FD-OCT probes into a single integrated probe assembly where multiple probes share common optical components including a single broadband light source, spectrometer, and detector. This merging allows simultaneous operation of multiple probes without requiring separate data acquisition systems for each, thereby increasing measurement throughput while maintaining fast data acquisition speed through centralized spectral analysis.
2Measurement precision
If conventional FD-OCT probes are used, then slab characterization is performed, but influence of vibration during measurement is not accounted for
Solution Approach 1:
The patent implements a feedback mechanism where the spectral analysis module analyzes interference patterns from multiple probes simultaneously and uses this information to compensate for vibrations affecting the slab during measurement. The system detects vibration-induced changes in the interference patterns and applies correction algorithms to maintain measurement precision despite the presence of harmful vibrations.
3Device complexity
If independent probe operation is used, then device complexity is reduced, but synchronized detection capability is lost
Solution Approach 1:
The patent merges the control systems of multiple probes into a single centralized control architecture. All probes are actuated simultaneously by a common actuation mechanism and their signals are processed together by a shared spectral analysis module. This merging reduces device complexity by eliminating redundant independent control systems while ensuring reliable synchronized detection through the inherent simultaneity of the shared optical path.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances measurement throughput and accuracy by synchronizing probe operations and analyzing interference patterns, thereby overcoming the limitations of existing technologies in characterizing slab properties, especially in ultra-thin slabs.
Implementation Method 1
analyze an interference pattern of the radiation detected by each of the OCT probes
Implementation Method 2
detect radiation reflected from the slab of material
Implementation Method 3
detect radiation reflected from the slab of material or transmitted there-through
Data Source
AI summary
The present subject matter at least provides an apparatus for characterization of a slab of a material. The apparatus comprises two or more frequency-domain optical-coherence tomography (FD-OCT) probes configured for irradiating the slab of material, and detecting radiation reflected from the slab of material or transmitted there-through. Further, a centralized actuation-mechanism is connected to the OCT probes for simultaneously actuating elements in each of the OCT probes to cause a synchronized detection of the radiation from the slab of material. A spectral-analysis module is provided for analyzing at least an interference pattern with respect to each of the OCT probes to thereby determine at least one of thickness and topography of the slab of the material. Further, in some embodiments, the slab of material may include a passivation layer. The apparatus may be configured to determine a thickness of the passivation layer.