Multi-probe FD-OCT Gauge for Slab Characterization
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Solution Overview
Problem
Frequency domain optical coherence tomography (FD-OCT) probes face limitations in throughput due to slow data-acquisition speed and failure to account for slab vibrations during characterization, particularly in ultra-thin slabs.
Innovation Solution
The implementation of synchronized FD-OCT probes with a centralized spectrometer-detector combination and a thin-film gauge to simultaneously measure slab properties, reducing the impact of vibrations and enhancing data-acquisition speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional FD-OCT probes are used for slab characterization, then measurement capability is provided, but data-acquisition speed is limited and throughput is reduced
Solution Approach 1:
The patent combines multiple FD-OCT probes into a single integrated probe assembly that simultaneously measures multiple slab parameters. This merging of multiple measurement functions into one probe enables parallel data acquisition, thereby increasing both data-acquisition speed and throughput without requiring multiple separate measurement systems.
Solution Approach 2:
The probe assembly is designed to perform multiple measurement functions simultaneously - measuring slab thickness, layer structure, and topography in a single operation. This multi-functionality allows the system to acquire comprehensive slab characterization data in one pass, significantly improving productivity and throughput compared to sequential single-parameter measurements.
2Speed
If conventional FD-OCT probes operate independently, then measurement is possible, but data-acquisition speed is limited due to independent operation of multiple probes
Solution Approach 1:
The patent merges multiple independent probe operations into a single synchronized probe assembly where all measurement functions operate simultaneously under unified control. This integration eliminates the complexity of coordinating multiple independent probes while maintaining high data-acquisition speed through parallel measurement capabilities.
3Measurement precision
If conventional measurement techniques are used, then slab characterization is performed, but vibration-induced errors occur during slab characterization
Solution Approach 1:
The probe assembly performs preliminary synchronized measurements of multiple slab parameters before vibration can significantly affect the measurement. By capturing thickness, layer structure, and topography data simultaneously in a single measurement window, the system minimizes the impact of slab vibrations that occur during the characterization process.
Solution Approach 2:
The measurement system uses periodic scanning synchronized with the slab transport and vibration cycles. By timing the measurement acquisition to occur during specific phases of the vibration cycle when slab position is most stable, the system reduces vibration-induced measurement errors while maintaining continuous production throughput.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise and efficient characterization of slab properties by synchronizing probe operations and using a centralized detection system, overcoming vibration-induced errors and improving measurement speed.
Implementation Method 1
a frequency-domain optical-coherence tomography (OCT) probe configured to irradiate the slab of material, and detect radiation reflected from the slab of material
Implementation Method 2
a spectral-analysis module configured to analyze at least an interference pattern with respect to the OCT probe to thereby determine a thickness of the slab of the material
Data Source
AI summary
The present subject matter at least provides an apparatus for inspecting a slab of material including a passivation layer. The apparatus includes a frequency-domain optical-coherence tomography (OCT) probe configured to irradiate the slab of material, and detect radiation reflected from the slab of material. The apparatus also includes a spectral-analysis module configured to analyze at least an interference pattern with respect to the OCT probe to thereby determine a thickness of the slab of the material. The apparatus also includes a thin-film gauge configure to determine a thickness of the passivation layer such that the determined thickness of the slab of material may be adjusted baes on the thickness of the passivation layer.