Multi-Racetrack Cathodic Arc Layout for Higher Deposition Rate
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Solution Overview
Problem
Current magnetically confined cathodic arc sources can only utilize one racetrack at a time, limiting the deposition rate in arc deposition systems.
Innovation Solution
The system employs multiple anodes surrounding a central cathode target, each independently inducing a racetrack erosion profile with associated magnetic components, allowing for simultaneous use of multiple racetracks by separating current paths between them.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple racetracks are available in magnetically confined cathodic arc sources, then the deposition rate can be increased, but currently only one racetrack can be utilized at a time due to random arc jumping between them
Solution Approach 1:
The system divides the single arc path into multiple independent racetracks (first racetrack and second racetrack), each associated with its own anode and magnetic component. This segmentation allows multiple erosion profiles to be created simultaneously on the cathode target, enabling parallel deposition processes that increase overall productivity while maintaining arc stability through dedicated current paths for each racetrack.
2Productivity
If the number of racetracks is increased to increase deposition, then productivity improves, but the system complexity increases as multiple anodes and magnetic components are required
Solution Approach 1:
The system employs multiple anodes (first anode and second anode) and magnetic components that can be configured to create multiple racetracks around a central cathode target. Each anode-magnetic component pair functions independently to generate and confine its own racetrack, providing multi-functionality that allows simultaneous operation of multiple erosion profiles. This universal configuration can be scaled to accommodate any number of racetracks while maintaining a consistent structural approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables more effective utilization of multiple racetracks, increasing deposition rates and improving the efficiency of arc deposition systems.
Implementation Method 1
At least two magnetic components are positioned within the central cathode target. The at least two magnetic components guide an associated arc that forms the associated racetrack erosion profile.
Implementation Method 2
Each anode is positively biased with respect to the central cathode target such that each anode independently induces an associated racetrack erosion profile on the central cathode target.
Data Source
AI summary
An arc deposition system includes a coating chamber and a central cathode target disposed within the coating chamber. At least two anodes surround the central cathode target. Each anode is positively biased with respect to the central cathode target such that each anode independently induces an associated racetrack erosion profile on the central cathode target. At least two magnetic components are located within the central cathode target. The magnetic components guide an associated arc that forms its associated racetrack erosion profile. Characteristically, each anode of the at least two anodes has an associated magnetic component.