Multi-Range Pressure Sensor Chip with Segmented Diaphragms
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Solution Overview
Problem
Current differential pressure/static pressure composite sensors face challenges in providing multiple differential-pressure measurement ranges due to limitations in diaphragm aspect ratios, making it difficult to achieve multi-range differential pressure sensing.
Innovation Solution
A pressure sensor chip design featuring multiple sensor diaphragms with different aspect ratios, where each diaphragm outputs a signal corresponding to pressure differences, with specific holding members and chambers to manage pressure transmission and prevent excessive displacement, allowing for multiple differential-pressure measurement ranges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple sensor diaphragms with different aspect ratios are mounted on a single chip, then multiple measurement ranges can be obtained, but it is difficult to provide multiple differential-pressure measurement ranges
Solution Approach 1:
The chip is divided into multiple independent sensing regions, each containing a sensor diaphragm with a different aspect ratio. Each diaphragm is independently connected to pressure introduction holes and chambers, allowing separate differential-pressure measurements. This segmentation enables multiple measurement ranges while maintaining a unified chip structure.
Solution Approach 2:
A single chip integrates multiple sensor diaphragms that can measure different differential-pressure ranges, making the device universal for both low-range and high-range differential-pressure measurements. The holding members and pressure introduction system serve multiple functions by supporting various diaphragm configurations.
2Adaptability or versatility
If diaphragms with different aspect ratios are used, then multiple measurement ranges are achieved, but sensitivity and withstand pressure determination becomes constrained
Solution Approach 1:
Each sensor diaphragm is designed with a specific aspect ratio optimized for particular pressure ranges. The first diaphragm has dimensions suited for low-range measurements, while the second diaphragm has dimensions optimized for high-range measurements. This local optimization of diaphragm properties ensures high measurement accuracy and reliability across different pressure ranges.
3Reliability
If excessive pressure is applied to the sensor diaphragm, then the diaphragm may be damaged, but preventing excessive displacement requires additional structural elements
Solution Approach 1:
The holding members are designed with recesses that extend into the diaphragm region, creating stoppers that prevent excessive diaphragm displacement before damage can occur. These recesses act as protective features built into the holding member structure, cushioning the diaphragm against over-pressure damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement of both low-range and high-range differential pressures by utilizing diaphragms with varying sensitivities, preventing diaphragm breakage under high pressures and ensuring reliable multi-range differential pressure sensing.
Implementation Method 1
Strain of the sensor diaphragm is detected as, for example, a change in resistance of a strain resistance gauge
Data Source
AI summary
A pressure sensor chip according to the present invention includes two static-pressure diaphragms (2, 3) formed by dividing an annular diaphragm arranged so as to surround a differential-pressure diaphragm (1). A reference pressure is applied to one surface of one static-pressure diaphragm (2), and a measurement pressure (Pa) for one surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (2) along a branched path. A reference pressure is applied to one surface of the other static-pressure diaphragm (3), and a measurement pressure (Pb) for the other surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (3) along a branched path. Accordingly, multiple differential-pressure measurement ranges can be provided.