Multi-Ring Seal Structure for Fluid Permeation and Leak-By
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Solution Overview
Problem
Substrate processing systems face challenges with fluid permeation and leak-by issues due to interface leaks at seals, leading to substrate degradation and performance degradation in etching, deposition, and cleaning processes, where existing seals like metal crush seals and paired elastomer O-rings have limitations in space, cost, and effectiveness.
Innovation Solution
The implementation of multi-layered single ring seals and multi-ringed seals with bridge members and layers on cores, which include materials like perfluoroelastomers and metals, to create a differential pressure system that reduces fluid permeation and leak-by by evacuating fluids through a cavity between ring members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional seals like metal crush seals or paired elastomer O-rings are used, then sealing function is provided, but fluid permeation and leak-by occur causing substrate degradation
Solution Approach 1:
The seal is divided into multiple independent band members (first band member, second band member, third band member) that can be compressed between sealing surfaces to create multiple sealing interfaces. This segmentation allows each band member to independently prevent permeation and leak-by, with the cavity between them serving as an evacuation path for any fluid that penetrates, thereby resolving the contradiction between providing sealing function and preventing fluid permeation.
Solution Approach 2:
The cavity formed between the band members acts as an intermediary chamber that receives and evacuates fluid that penetrates through the seals. By providing this intermediate evacuation path, the system prevents fluid from directly reaching the substrate, thus resolving the contradiction between allowing some permeation (through the cavity evacuation system) and preventing harmful fluid contact with the substrate.
2Object-affected harmful factors
If multi-layered single ring seals and multi-ringed seals with bridge members are implemented, then fluid permeation and leak-by are reduced, but device complexity increases
Solution Approach 1:
The seal structure is segmented into multiple band members connected by bridge members, creating a modular design. This segmentation allows the complex multi-layered structure to be built from simpler repeating units (band members with connecting bridges), making the complexity manageable and the manufacturing process more systematic rather than requiring a single complex piece.
Solution Approach 2:
The band members are arranged in nested configurations where the first band member, second band member, and third band member are positioned sequentially between sealing surfaces, with cavities formed between them. This nesting approach allows multiple sealing functions to be integrated in a compact arrangement, reducing the overall space required while maintaining the complex multi-layered sealing capability.
3Ease of manufacture
If inexpensive cores with thin chemical-resistant layers are used, then cost-effectiveness is improved, but chemical resistance may be compromised
Solution Approach 1:
The seal employs composite material construction where inexpensive core materials (such as elastomers or polymers) are combined with thin layers of chemically resistant materials (such as PTFE, PFA, or other fluoropolymers). This composite approach allows the bulk of the seal to be made from cost-effective materials while the thin chemical-resistant coating provides the necessary chemical protection, thus resolving the contradiction between cost-effectiveness and chemical resistance.
Solution Approach 2:
The chemical-resistant coating is applied only where needed on the core material surfaces that contact the fluid and substrate. This local quality approach ensures that chemical resistance is provided precisely at the critical interfaces without requiring the entire seal structure to be made from expensive chemically resistant materials, thereby maintaining both cost-effectiveness and adequate chemical resistance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
These seals significantly reduce permeation and leak-by rates, providing improved chemical resistance and cost-effectiveness by using inexpensive cores with thin chemical-resistant layers, and allowing for purging of fluids from sealed surfaces, thus enhancing the reliability and efficiency of substrate processing systems.
Implementation Method 1
creating a differential pressure system that reduces fluid permeation and leak-by by evacuating fluids through a cavity between ring members
Data Source
AI summary
A seal to prevent fluid through a first interface between the seal and a first body, includes first and second band members and a bridge member. The first band member defines a first band seal surface on first side of the first band member. The first band member is configured to provide a first fluid seal with the first body when compressed to the first body. The second band member defines a second band seal surface on a first side of the second band member. The second band member is configured to provide a second fluid seal with the first body when compressed to the first body. The first band member and the second band member at least partially define a cavity between the first band member and the second band member. The bridge member extends through the cavity and connects the first band member to the second band member.