Multi-Sample Charged Particle Array for Throughput-Limited Scanning
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Solution Overview
Problem
Existing charged particle assessment systems face limitations in throughput due to space constraints, hindering the ability to increase the number of charged particle devices for scanning samples, which is crucial for high-yield and high-throughput semiconductor manufacturing.
Innovation Solution
A charged particle apparatus with an array of devices that project multiple beam grids simultaneously onto multiple samples, utilizing an actuated stage and detectors to enhance scanning efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of charged particle devices is increased to increase throughput, then productivity is improved, but device complexity and space requirements increase
Solution Approach 1:
Multiple charged particle devices are combined into a single integrated apparatus that projects multiple beam grids simultaneously onto multiple samples. The apparatus includes an array of charged particle devices with shared components including a common stage, vacuum chamber, and control systems, thereby increasing throughput while managing device complexity through consolidation
Solution Approach 2:
The system transitions from scanning single samples sequentially to simultaneously scanning multiple samples arranged in an array. By adding the spatial dimension of multiple sample positions and using a two-dimensional beam grid array, the system achieves higher throughput without proportionally increasing the complexity of individual device components
2Productivity
If multiple charged particle devices are positioned to scan each sample, then productivity is improved, but the space available in the assessment system is exceeded
Solution Approach 1:
The sample array is segmented into multiple discrete sample positions, with each position receiving focused beams from the array of charged particle devices. This segmentation allows efficient use of space by directing beams only to active sample locations rather than requiring uniform distribution of devices throughout the available space
Solution Approach 2:
The stage serves multiple functions: it supports multiple samples simultaneously, positions them precisely for beam scanning, and can be actuated to bring different sample positions into the scanning area. This multi-functionality reduces the need for separate positioning mechanisms for each sample, thereby saving space
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables simultaneous scanning of multiple samples, increasing throughput and reducing the need for operator intervention, thereby improving yield and reducing costs in semiconductor manufacturing.
Implementation Method 1
Each charged particle device comprises an objective lens configured to direct the beam grid of the charged particle device on a sample at the respective sample position
Implementation Method 2
Each charged particle device comprises a detector configured to detect signal particles from the sample
Data Source
AI summary
A charged particle apparatus for projecting multiple beam grids of charged particle beams towards a plurality of samples. The apparatus includes: a stage configured to support a plurality of samples at respective sample positions; and an array of charged particle devices respectively configured to project a plurality of charged particle beams in a beam grid towards the respective the sample positions. The charged particle devices respectively include: an objective lens configured to direct the beam grid of the charged particle device on a sample at the respective sample position; and a detector configured to detect signal particles from the sample. The stage is configured to be actuated relative to the array of charged particle devices. The stage and the array of charged particle devices are configured such that the array of charged particle devices scan relative to the plurality of samples simultaneously.