Multi-Shield Plate Rotation for Laser Annealing Vapor Shield Replacement
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Solution Overview
Problem
In integrated circuit manufacturing, particularly during laser spike annealing, existing vapor shield systems fail to effectively manage vapor coating on vapor shields, leading to reduced light intensity and increased manufacturing defects due to particle release, which affects processing accuracy and yield.
Innovation Solution
A vapor shield replacement system with a multi-shield plate and actuation device that automatically detects coated vapor shields using light intensity measurements and replaces them with uncoated ones, ensuring consistent light transmission and reducing particle-induced defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single vapor shield is used, then the device complexity is low, but the productivity decreases due to frequent manual replacement and system downtime
Solution Approach 1:
The vapor shield is divided into multiple individual shields arranged on a rotatable plate, allowing independent replacement of each shield segment. This segmentation enables continuous operation by rotating to a fresh shield while one is being replaced, thereby improving productivity without requiring complete system shutdown.
Solution Approach 2:
Multiple vapor shields are pre-loaded on the rotatable plate in advance. When one shield becomes coated, the system can immediately rotate to use a pre-positioned uncoated shield, eliminating waiting time for replacement and maintaining continuous productivity.
2Loss of time
If manual monitoring and replacement of vapor shields is performed, then the device complexity is low, but the loss of time increases due to operator intervention requirements
Solution Approach 1:
An optical sensor continuously monitors the light transmission through each vapor shield and provides feedback to the control system. When coating is detected (indicated by reduced light transmission), the system automatically triggers the replacement process, eliminating the need for manual monitoring and reducing time loss.
Solution Approach 2:
The system performs self-monitoring and self-replacement of vapor shields through automated detection and actuation mechanisms. The control system automatically identifies coated shields and activates the actuation device to replace them, reducing operator intervention time and enabling continuous operation.
3Manufacturing precision
If vapor shields are not replaced timely, then the device complexity is low, but the manufacturing precision decreases due to particle release from coated shields
Solution Approach 1:
The optical sensor provides continuous feedback on the coating condition of vapor shields, enabling the control system to detect when shields are becoming coated and trigger replacement before particles are released. This proactive monitoring maintains manufacturing precision by preventing particle contamination.
Solution Approach 2:
The system replaces vapor shields proactively before significant coating accumulation occurs that would lead to particle release. By monitoring light transmission and triggering replacement at predetermined thresholds, the system prevents the formation of particle-generating coatings, thereby maintaining manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system prevents vapor shield coating above a predetermined thickness, reducing processing errors and manufacturing defects, and minimizing operator time and system downtime by automating the replacement process, thereby enhancing the accuracy and efficiency of annealing processes.
Implementation Method 1
an optical sensor detects light emitted and/or reflected from the object in response to the light beam
Data Source
AI summary
A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.