Multi-Source Illumination Unit With Reflector for Image Uniformity
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Solution Overview
Problem
Conventional illumination units in optical systems, such as those used in semiconductor wafer inspection, often result in poor quality images due to uneven illumination, leading to difficulty in defect identification and decreased efficiency and reliability of semiconductor devices.
Innovation Solution
An illumination unit with two electromagnetic wave sources, each emitting waves in opposite directions, and a reflector to redirect one wave, allowing simultaneous illumination of different sample regions with varying intensities or wavelengths, and adjustable field of view.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single light source is used to illuminate a sample, then the device complexity is low, but the illumination uniformity deteriorates leading to poor image quality
Solution Approach 1:
The illumination unit is divided into multiple independent electromagnetic wave sources (first and second sources), each illuminating different regions of the sample. This segmentation allows each source to be optimized for specific illumination requirements while collectively providing uniform coverage across the entire sample area, thereby improving image quality without excessive complexity increase
Solution Approach 2:
Multiple electromagnetic wave sources and their corresponding optical paths are merged into a single integrated illumination unit. The first and second electromagnetic wave sources, along with their respective diffusers and the reflector, are combined to work synergistically, providing both regional specificity and overall illumination uniformity
2Manufacturing precision
If multiple electromagnetic wave sources are used to improve illumination uniformity, then the image quality improves, but the device complexity increases
Solution Approach 1:
The reflector serves multiple functions: it redirects the second electromagnetic wave to illuminate a second region of the sample, and simultaneously helps shape and distribute the illumination across the sample. This multi-functionality reduces the need for additional separate components, thereby managing device complexity while maintaining improved image quality
Solution Approach 2:
Diffusers are introduced as intermediary components between the electromagnetic wave sources and the sample. These diffusers soften and distribute the light from each source, improving illumination uniformity and reducing harsh shadows, thereby enhancing image quality without requiring direct complex positioning of multiple sources
3Ease of operation
If a fixed field of view is provided by a single light source, then the ease of operation is high, but the adaptability deteriorates
Solution Approach 1:
The illumination unit is designed with dynamic capabilities through independent control of the first and second electromagnetic wave sources. This allows the field of view and illumination regions to be adjusted dynamically based on inspection requirements, enhancing adaptability while maintaining operational simplicity through automated control mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves image quality by minimizing contrast and shadow effects, enhancing defect detection accuracy and throughput in semiconductor manufacturing.
Implementation Method 1
a reflector configured to reflect the second electromagnetic wave substantially in the first direction to illuminate a second region of the sample
Data Source
AI summary
An illumination unit comprising a first electromagnetic wave source including circuitry for outputting a first electromagnetic wave in a first direction to illuminate a first region of a sample; a second electromagnetic wave source including circuitry for outputting a second electromagnetic wave in a second direction substantially opposite to the first direction; and a reflector configured to reflect the second electromagnetic wave substantially in the first direction to illuminate a second region of the sample.