Multi-Source X-Ray Stress Measurement Using Segmented Irradiation

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Solution Overview

Problem

Conventional X-ray stress measurement methods require lengthy measurement times due to the need to vary the Ψ angle multiple times and use a single X-ray source, making it difficult to determine stress gradients in a depth direction efficiently.

Innovation Solution

The method involves using multiple X-ray sources to irradiate a sample at different incident angles, focusing on Debye-rings to simultaneously obtain X-ray diffraction information at various Ψ angles, allowing for rapid stress measurement and stress gradient analysis in the depth direction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single X-ray source is used to measure stress by varying the Ψ angle multiple times, then measurement accuracy is maintained, but measurement time becomes excessively long

Engineering Contradiction:
Improvestress measurement accuracyVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent divides the X-ray measurement system into multiple independent X-ray sources (at least two), each capable of irradiating the sample at different incident angles simultaneously. This segmentation allows parallel acquisition of diffraction data at multiple Ψ angles, resolving the contradiction between maintaining measurement accuracy and reducing measurement time.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a new spatial dimension by arranging multiple X-ray sources at different positions and incident angles relative to the sample. Instead of sequentially varying the Ψ angle with a single source, the system simultaneously captures diffraction information from multiple angles in a multi-dimensional spatial configuration, enabling rapid stress measurement without compromising accuracy.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the incident angle is varied or multiple X-ray sources are exchanged to determine stress gradient in depth direction, then depth resolution is achieved, but measurement time increases further

Engineering Contradiction:
Improvestress gradient measurement precisionVSAvoidmeasurement time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent employs multiple X-ray sources positioned at different incident angles, where each source contributes to measuring stress at different depths simultaneously. This parallel segmentation of the measurement function across multiple sources eliminates the need for sequential angle variation or source exchange, achieving rapid stress gradient measurement in the depth direction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent enables continuous simultaneous measurement by having multiple X-ray sources operate concurrently at different incident angles. Instead of interrupting the measurement process to vary angles or exchange sources, the system maintains continuous useful action through parallel data acquisition, resolving the time-consuming nature of traditional depth-resolved stress gradient measurement.

Inventive Principle:
Principle #20Continuity of useful action

3Productivity

If multiple X-ray sources are used to irradiate the sample simultaneously at different incident angles, then measurement speed is improved, but device complexity increases

Engineering Contradiction:
Improvemeasurement speedVSAvoidX-ray source configuration
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

While segmentation into multiple X-ray sources does increase device complexity, the patent justifies this by demonstrating that the parallel measurement capability provides substantial productivity improvement. Each segmented source operates independently at a fixed incident angle, simplifying the control system compared to sequential angle variation mechanisms.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces measurement time by obtaining information for multiple Ψ angles simultaneously, enabling faster and more precise determination of stress and stress gradients within the sample.

Implementation Method 1

irradiating a sample with X-rays at a plurality of different incident angles from a plurality of X-ray sources; focusing attention on a Debye-ring of each X-ray diffraction radiated conically from the sample in association with incident X-ray emitted from each of the X-ray sources

Methodology Applied
Scientific EffectX-ray diffraction: Bragg Diffraction

Data Source

PatentUS8953743B2X-ray stress measurement method and apparatus
Publication Date: 2015.02.10 RIGAKU CORP
  • US8953743B2 patent drawing
  • US8953743B2 patent drawing
  • US8953743B2 patent drawing

AI summary

A sample (1) is irradiated with X-rays at different incident angles from plural X-ray sources (21, 22). Attention is focused on a Debye-ring of each X-ray diffraction emitted conically from the sample in association with incident X-ray from each of the X-ray sources (21, 22), and stress in the sample (1) is determined on the basis of information of X-ray diffraction appearing at an intersection point between the Debye-ring of the X-ray diffraction recorded on an image plate (30) and an equatorial plane (H) and information of X-ray diffraction appearing in the neighborhood of the intersection point between the Debye-ring and the equatorial plane (H).