Multi-Spiral Support Damping for Lithography Vibration Control
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Solution Overview
Problem
Lithographic apparatuses face challenges in achieving accurate pattern projection and high throughput while maintaining optimal dynamic behavior, as existing support systems either increase mass or stiffness, which is undesirable.
Innovation Solution
A support system with a coil spring comprising moveable spiral members and a damper device attached to one of the spiral members, which reduces displacement at specific vibration frequencies without significantly increasing mass or stiffness, thereby improving dynamic behavior.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an intermediate mass is added to a coil spring in the support, then the dynamic properties of the support are changed, but the mass and/or stiffness of the support increases
Solution Approach 1:
The patent changes the physical parameters of the coil spring by creating a multi-spiral member structure with selective rigidity. Different spiral members have different rigidity characteristics, allowing the support to achieve desired dynamic properties through parameter variation rather than adding mass. The damper device further modifies dynamic parameters by controlling vibration amplitude at specific frequencies.
Solution Approach 2:
The support system combines multiple spiral members with different rigidity characteristics into a composite spring structure. This composite approach allows the system to achieve complex dynamic behavior that cannot be obtained with a single uniform spring, while avoiding the need to add intermediate masses.
2Reliability
If an intermediate mass is added to a coil spring in the support, then the dynamic properties of the support are changed, but the stiffness of the support increases
Solution Approach 1:
The patent varies the rigidity parameters of individual spiral members to achieve the desired dynamic response. By making some spiral members more rigid and others less rigid, the system can tune its dynamic properties without uniformly increasing overall stiffness, which would be caused by adding intermediate mass.
3Productivity
If the throughput of the lithographic apparatus is increased, then the desired throughput is achieved, but the dynamic behaviour of components deteriorates
Solution Approach 1:
The support system is designed with inherent dynamic characteristics through its multi-spiral member structure. The different rigidity levels of various spiral members create a dynamic response that can accommodate higher throughput operations while maintaining component stability. The damper device further enhances this by specifically targeting and reducing vibrations that occur at high operational speeds.
Solution Approach 2:
The patent explicitly addresses mechanical vibration through the damper device attached to the first spiral member. By damping vibrations at specific frequencies, the system can operate at higher throughput levels without the dynamic behavior deterioration that would normally occur during high-speed operation.
4Manufacturing precision
If the accuracy of the projected pattern is increased, then the positioning accuracy is improved, but the dynamic behaviour requirements become more stringent
Solution Approach 1:
The multi-spiral member support structure provides optimized dynamic characteristics that enable high positioning accuracy. The selective rigidity distribution among spiral members creates a dynamic response that supports precise positioning while the damper device eliminates vibrations that would compromise measurement and positioning accuracy.
Solution Approach 2:
The damper device specifically addresses mechanical vibrations that would interfere with accurate positioning and measurements. By reducing vibrations at critical frequencies, the system can achieve the stringent dynamic behavior requirements necessary for high-accuracy pattern projection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The support system enhances the dynamic behavior of lithographic apparatuses by effectively damping vibrations at high frequencies, maintaining accuracy and throughput without adding excessive mass or stiffness.
Implementation Method 1
a coil spring which is arranged between the first end portion and the second end portion
Implementation Method 2
a damper device which is attached to the first spiral member... reduces displacement at specific vibration frequencies
Data Source
AI summary
The invention provides a support with first and second end portions. The second end portion is on the side opposite to the first end portion in a longitudinal direction of the support. A coil spring is arranged between the first and second end portions. The coil spring comprises a first spiral member that extends between the first and second end portions in a circumferential direction of the support, and a second spiral member that extends between the first and second end portions in a circumferential direction of the support. The first and second spiral members extend in the longitudinal direction around a longitudinal axis of the support, wherein the first spiral member of the coil spring and the second spiral member of the coil spring are moveable relative to each other, and wherein the support further comprises a damper device that is attached to the first spiral member.