Multi-stack graphene structure with dielectric layers

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current graphene technologies face challenges in forming high-quality thin film dielectric layers of less than 20 nm thickness, which is essential for multi-stack graphene structures, and in efficiently modulating optical and electric properties.

Innovation Solution

The development of a multi-stack graphene structure comprising alternately stacked amorphous graphene layers and thin film dielectric layers, with an electric field former to apply electric fields, enhancing optical modulation efficiency and allowing for the formation of thin film dielectric layers using atomic layer deposition (ALD) with materials like Al2O3, HfO2, SiO2, Si3N4, ZrO2, and Ta2O5.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional crystalline graphene is used, then manufacturing process is simpler, but achieving small thickness and efficient electric and optical property modulation is difficult

Engineering Contradiction:
Improvethickness controlVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent segments the graphene structure into multiple alternating layers of amorphous graphene and dielectric materials, creating a multi-stack configuration. This segmentation enables precise control of total thickness while maintaining the functional properties of graphene, resolving the contradiction between achieving small thickness and maintaining structural simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the structural parameter of graphene from crystalline to amorphous configuration, and introduces dielectric layers between graphene stacks. This parameter change enables better control over thickness and electric field distribution, allowing efficient modulation of optical and electric properties while achieving the desired thin film thickness.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If thin film dielectric layers of less than 20 nm thickness are formed, then optical modulation efficiency is improved, but manufacturing difficulty increases

Engineering Contradiction:
Improveoptical modulation efficiencyVSAvoidthin film formation difficulty
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent creates a composite structure combining amorphous graphene with dielectric materials in alternating layers. This composite approach allows the dielectric layers to be deposited at thin thicknesses (less than 20 nm) while maintaining manufacturing feasibility, as the alternating structure provides a template that guides the deposition process and ensures proper thickness control.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent employs preliminary formation of amorphous graphene layers as a template for subsequent dielectric layer deposition. This preliminary structure guides the deposition process, enabling precise control of dielectric layer thickness and ensuring proper alignment, thereby reducing manufacturing difficulty while achieving the required thin film thickness for high optical modulation efficiency.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If amorphous graphene layers are used instead of crystalline graphene, then thin film dielectric layer formation is improved, but material synthesis complexity increases

Engineering Contradiction:
Improvethin film dielectric layer qualityVSAvoidgraphene synthesis complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent changes the structural parameter of graphene from crystalline to amorphous configuration. This parameter change improves the compatibility with thin film dielectric layer formation processes, as amorphous structures provide better templates for dielectric deposition. The synthesis complexity is managed by using established CVD methods with controlled conditions to produce amorphous graphene, which then enables precise thin film dielectric layer formation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of a multi-stack graphene structure with improved optical modulation efficiency and reduced thickness, overcoming the limitations of conventional crystalline graphene in achieving small thickness and efficient electric and optical property modulation.

Implementation Method 1

The thin film dielectric layers may be formed by using atomic layer deposition (ALD)

Methodology Applied
Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Implementation Method 2

an electric field former configured to apply an electric field to the graphene layers

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS11067836B2Multi-stack graphene structure and device including the same
Publication Date: 2021.07.20 SAMSUNG ELECTRONICS CO LTD
  • US11067836B2 patent drawing
  • US11067836B2 patent drawing
  • US11067836B2 patent drawing

AI summary

A multi-stack graphene structure includes a graphene stack that includes graphene layers including amorphous graphene and thin film dielectric layers. The graphene layers include amorphous graphene. The graphene layers and the thin dielectric layers are alternately stacked on one another. The multi-stack graphene structure also includes an electric field former configured to apply an electric field to the graphene layers.