Multi-Stage Displacement Device Cross-Coupling Control
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Solution Overview
Problem
Existing displacement devices face challenges in controllably moving multiple movable stages relative to a stator due to cross-coupling forces, which affect the efficient movement and control of multiple stages in a displacement device.
Innovation Solution
The system employs a stator with pluralities of electrically conductive coils and moveable stages with magnet arrays, where magnet arrays from different stages overlap shared coil traces, and currents are controllably driven based on the positions of both stages to manage magnetic forces and minimize cross-coupling, allowing independent control of each stage's movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple moveable stages are moved in a displacement device, then productivity and operational efficiency are improved, but cross-coupling forces between stages increase causing control difficulties
Solution Approach 1:
The system divides the control of multiple moveable stages into independent control channels, where each stage has its own controller that can independently manage its position and movement. This segmentation allows simultaneous operation of multiple stages without mutual interference, resolving the cross-coupling issue while maintaining high productivity
Solution Approach 2:
The control system dynamically adjusts operating parameters for each moveable stage based on real-time position and movement requirements. This dynamic control enables the system to adapt to changing conditions and eliminate cross-coupling forces that would otherwise occur with static control methods, allowing efficient multi-stage operation
2Productivity
If multiple moveable stages are moved simultaneously, then operational efficiency is improved, but control precision deteriorates due to force cross-coupling
Solution Approach 1:
Each moveable stage is equipped with an independent controller that segments the control function, allowing precise positioning of each stage without interference from other stages. This independent control segmentation maintains manufacturing precision while enabling simultaneous operation of multiple stages for high operational efficiency
Solution Approach 2:
The system employs feedback mechanisms where each controller continuously monitors the position and movement of its associated moveable stage and adjusts control signals accordingly. This feedback control eliminates cross-coupling effects and maintains precise control even when multiple stages operate simultaneously, resolving the precision issue while preserving operational efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient and precise control of multiple movable stages with reduced cross-coupling forces, allowing for independent movement and positioning in six degrees of freedom, enhancing the operational efficiency and accuracy of displacement devices.
Implementation Method 1
the interaction between current-carrying coils and permanent magnets
Implementation Method 2
forces generated by the displacement device to move a first moveable stage
Data Source
Figure 1A
Figure 1B
Figure 2~4
AI summary
Aspects of the invention provide methods and systems for moving a plurality of moveable stages relative to a stator. The stator comprises a plurality of coils shaped to provide pluralities of coil trace groups where each coil trace group comprises a corresponding plurality of generally linearly elongated coil traces which extend across a stator tile. Each moveable stage comprises a plurality of magnet arrays. Methods and apparatus are provided for moving the moveable stages relative to the stator, where a magnet array from a first moveable stage and a magnet array from a second moveable stage both overlap a shared group of coil traces. For at least a portion of the time that the magnet arrays from the first and second moveable stages overlap the shared group of coil traces, currents are controllably driven in the shared coil trace group based on the positions of both the first and second moveable stages. The positions of the first and second moveable stages may be ascertained by feedback.