Multi-Story Substrate Treatment Lines for Parallel Process Execution
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Solution Overview
Problem
Conventional substrate treating apparatuses face difficulties in efficiently changing substrate treatment processes for each substrate, leading to challenges in performing multiple processes in parallel.
Innovation Solution
A substrate treating apparatus with multiple substrate treatment lines and a controller that allows for the change of treatment processes for each substrate treatment line, enabling parallel execution of different treatment processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single main transport mechanism is used in each treating block, then the apparatus structure is simplified, but the ability to perform multiple different treatment processes in parallel is limited
Solution Approach 1:
The apparatus is divided into multiple treating blocks (first treating block, second treating block, etc.), each with its own independent main transport mechanism. This segmentation allows each block to operate independently with different treatment processes, resolving the contradiction by enabling process versatility while keeping each individual block's structure simple.
Solution Approach 2:
Each treating block is designed as a universal module that can perform different treatment processes (resist film forming, developing, heat treatment, etc.). The main transport mechanisms in different blocks can be assigned different processes, allowing the same structural design to serve multiple functions across the apparatus.
2Device complexity
If substrates are transported through a single treatment line, then the transport path is simple, but the throughput and parallel processing capability are reduced
Solution Approach 1:
The apparatus introduces multiple treatment lines (first treatment line, second treatment line, etc.) that operate in parallel, adding a dimensional aspect to substrate processing. Instead of a single sequential path, substrates can be processed through multiple concurrent paths, significantly increasing throughput while maintaining relatively simple individual transport paths.
Solution Approach 2:
Multiple treating blocks and treatment lines are merged into a single integrated apparatus with a unified control system. This allows parallel processing of substrates through different treatment lines while maintaining coordinated operation, achieving high throughput without requiring completely separate independent systems.
3Device complexity
If the same treatment process is applied to all substrates, then the control system is simplified, but the flexibility to handle different process requirements is lost
Solution Approach 1:
The control system is segmented to independently control each treating block and main transport mechanism. This allows different treatment processes to be assigned to different blocks without requiring complex coordination, simplifying the overall control architecture while enabling process customization across multiple parallel lines.
Data Source
AI summary
A substrate treating apparatus for treating substrates includes a plurality of substrate treatment lines arranged vertically for carrying out plural types of treatment on the substrates while transporting the substrates substantially horizontally, and a controller for changing processes of treatment carried out on the substrates for each of the substrate treatment lines. By changing the processes of treatment carried out for the substrates for each substrate treatment line, the processes of treatment carried out for the substrates can be changed for each substrate conveniently. Thus, a plurality of different processes of treatment corresponding to the number of substrate treatment lines can be carried out in parallel for the respective substrates.