Multi-table lithography system parallel transport mechanism
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Solution Overview
Problem
Conventional multi-table systems for workpiece processing require duplicate loading and alignment systems and areas due to serial process steps, leading to low throughput and inefficient system resource utilization.
Innovation Solution
A multi-table system where at least two tables are configured to pass each other while moving between a loading area and a processing area, with each table mounted on a bearing providing prismatic movement along a shaft and rotational movement around the same shaft, allowing for simultaneous loading and processing of workpieces using a single loading and processing area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple substrate carrying tables are arranged on a single prismatic axis to enable parallel activities, then throughput is improved, but duplicate loading and alignment systems and areas are required increasing device complexity
Solution Approach 1:
The patent merges the loading and alignment functions into a single shared system that serves multiple substrate carrying tables. Instead of having separate loading and alignment systems for each table, the invention implements a unified loading area and alignment system that can service multiple tables, thereby reducing device complexity while maintaining the parallel processing capability that improves throughput.
Solution Approach 2:
The loading and alignment systems are designed with universal functionality to handle multiple substrate tables. The single loading area and alignment system can accommodate and process substrates from different tables, making the system multi-functional rather than dedicated to a single table, thus eliminating the need for duplicate systems.
2Productivity
If tables are arranged to pass each other between loading and processing areas, then system resource utilization is improved, but the mechanism for raising and lowering tables increases device complexity
Solution Approach 1:
The patent implements dynamic table positioning where tables can change their vertical position (raised or lowered) based on operational requirements. The bearing mechanism allows tables to dynamically adjust their height to pass each other during transport, enabling flexible resource utilization while maintaining a relatively simple mechanical structure compared to more complex positioning systems.
Solution Approach 2:
Instead of managing table interactions in the horizontal plane only, the patent introduces vertical movement as an additional dimension. By raising or lowering tables vertically, the system allows tables to pass each other without horizontal interference, effectively using the third dimension to resolve spatial conflicts and improve resource utilization with a relatively simple mechanism.
3Device complexity
If serial process steps are used for loading, measuring, writing and unloading, then system simplicity is maintained, but idle time for system resources exists resulting in low throughput
Solution Approach 1:
The patent implements preliminary action by having multiple substrate tables prepared and positioned in advance. While one table is being processed, another table can be loaded and prepared in the loading area. This overlapping of operations eliminates idle time between process steps, improving throughput while maintaining a relatively simple sequential system architecture.
Solution Approach 2:
The system maintains continuity of useful action by ensuring that system resources are continuously utilized without idle time. Multiple tables in different stages of processing ensure that the processing area, loading area, and transport mechanisms are always engaged in productive work, eliminating the idle periods that occur in purely serial systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces idle time for system resources, increases throughput by allowing parallel activities, and simplifies the system architecture, reducing costs and space requirements while maintaining high precision and accurate velocity control.
Implementation Method 1
at least a first of the at least two tables is mounted on a bearing providing movement along a shaft and rotational movement around the same shaft
Implementation Method 2
rotational movement around the same shaft as a rotational axis
Data Source
Figure 1
Figure 2
Figure 3(A)~3(E)
AI summary
A lithographic workpiece processing tool includes a loading area (108) for loading a workpiece; and a processing area (106) for processing a workpiece. The workpiece processing tool further includes a multi-table system (10) arranged between the loading area and the processing area. The multi-table system includes at least two tables (110, 112) configured to pass each other while moving between the loading area and the processing area. Each of the at least two tables is configured to hold a workpiece.