Multi-tip AFM Calibration via Common Feature Recognition
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Solution Overview
Problem
Calibrating multi-tip AFM systems for scanning and probing at very close proximity is time-consuming and labor-intensive, especially as semiconductor circuits with closely spaced metal lines become smaller, making it difficult to achieve efficient, precise, and high-throughput scanning.
Innovation Solution
An automated calibration process using scan data from multiple AFM probe heads to position them at relative offset positions, allowing for synchronous scanning and increased precision, which involves recognizing common features in scan images to calculate relative offsets and adjust the probe tips to bring them closer together, with the ability to repeat this process at varying levels of precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual calibration methods are used for multi-tip AFM systems, then the system can be calibrated, but the process becomes time-consuming and labor-intensive
Solution Approach 1:
The system performs self-calibration by automatically capturing scan images from multiple probe tips, identifying common features through image processing, calculating relative offsets, and adjusting tip positions without requiring manual intervention. This self-service mechanism eliminates the time-consuming and labor-intensive manual calibration process while maintaining high calibration accuracy.
Solution Approach 2:
The calibration process performs preliminary actions by first capturing scan images from all probe tips, then automatically processing these images to identify common features and calculate relative positions before physically adjusting the tip positions. This preliminary image processing and offset calculation prepares the system for precise positioning, reducing the overall calibration time and effort required.
2Manufacturing precision
If multiple probe tips are positioned at very close proximity for high-resolution scanning, then the ability to scan small features is improved, but the calibration difficulty increases significantly
Solution Approach 1:
The system uses scan images and common feature identification as an intermediary mechanism to facilitate calibration. By capturing images from multiple tips and automatically identifying features that appear in multiple images, the system creates a reference framework that simplifies the calibration process. This intermediary approach allows for precise positioning of tips at close proximity without increasing calibration difficulty, as the automated image processing and offset calculation handle the complexity.
3Productivity
If automated calibration is implemented, then calibration time is reduced, but the system complexity increases
Solution Approach 1:
The automated calibration system integrates multiple functions into a single unified process: capturing scan images from multiple tips, processing images to identify common features, calculating relative offsets between tips, and adjusting tip positions. This multi-functional approach increases productivity by automating the entire calibration workflow, while the universal nature of the process (applicable to multiple tips simultaneously) justifies the increased system complexity through efficiency gains.
Data Source
AI summary
Systems, methods, and program products are provided for the calibration and scanning of multiple AFM probe heads used employed together for synchronous scanning. An automated calibration process is provided employing scan data from multiple AFM probe heads to automatically calibrate the system and position the probe heads at relative offset positions that are successively closer and more precise. Multiple heads are scanned simultaneously and synchronously to produce scan images, which are automatically evaluated to recognize a common feature. From this, a relative offset of the images is calculated and the true position of each probe tip may be known. Using this knowledge, a position offset is applied to bring the probe tips closer together at a desired spatial relationship. The techniques may be repeated at two or more levels varying from coarse to fine, and may be repeated after probing or movement to a new region of interest.