Multi-Tube Chemical Pump for High-Volume Bubble-Free Supply
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Solution Overview
Problem
Existing pumps used in substrate treatment apparatuses face challenges such as low discharge volume, bubble generation, high risk of particle contamination, and increased costs or installation space when attempting to increase supply volume, particularly with diaphragm and TubePhragm pumps.
Innovation Solution
A pump design featuring a case with a pressure space, pressurizing member, and multiple tubes that contract under pressure, along with manifolds for chemical suction and discharge, and shrinkage detection sensors to manage tube shrinkage, allowing for increased supply volume without tube deformation and reduced costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the tube size of TubePhragm is increased to increase supply volume, then the supply volume increases, but the risk of plastic deformation of the tube increases due to increased pressure requirements
Solution Approach 1:
The invention divides the single large tube into multiple smaller tubes (first plurality of tubes and second plurality of tubes) that work in parallel. This segmentation allows the pump to achieve high supply volume without requiring individual tubes to be oversized, thereby avoiding plastic deformation while maintaining reliability.
2Quantity of substance
If multiple TubePhragms are connected in parallel to increase supply volume, then the supply volume increases, but the installation space and costs increase
Solution Approach 1:
The invention merges multiple tube functions into a single integrated pump structure. The case integrates manifolds, multiple tubes, and pressurizing mechanisms into one compact unit, achieving the supply volume of multiple pumps without requiring separate installations, thereby reducing installation space and costs.
3Quantity of substance
If multiple TubePhragms are connected in parallel to increase supply volume, then the supply volume increases, but individual differences in pump flow characteristics occur
Solution Approach 1:
The invention segments the flow path into multiple identical parallel tubes within a single controlled environment (the case). This segmentation with unified control ensures that all tubes experience the same operating conditions, eliminating individual differences in flow characteristics while achieving high supply volume.
4Quantity of substance
If a bellows pump is used to achieve large supply volume, then the supply volume increases, but the discharge of mixed bubbles is poor and particle generation risk increases
Solution Approach 1:
The invention extracts the bubble removal function from the chemical supply path by providing a separate gas venting mechanism. The case includes a gas vent that allows bubbles to be separated and vented independently from the chemical flow, eliminating bubble contamination while maintaining high supply volume capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances chemical supply capacity while minimizing tube deformation risk and installation space, ensuring efficient bubble removal and uniform chemical distribution, thus improving the performance and reliability of substrate treatment processes.
Implementation Method 1
a pressurizing member (340) connected to the pressure space by a pressurizing line; and a plurality of tubes (200) disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line
Data Source
AI summary
The present disclosure provides a pump, a chemical supply unit, and a substrate treatment apparatus.A pump according to an embodiment of the present disclosure includes: a case having a pressure space formed therein; a pressurizing member connected to the pressure space by a pressurizing line; and a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.