Multi-Tube Fluid Sensor for Wide-Range Flow Accuracy
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Solution Overview
Problem
Existing fluid sensors fail to maintain high measurement accuracy across a wide range and do not meet reliability requirements, particularly in fields like semiconductors and aerospace, where they struggle with flows below 25% of the full-scale range and are prone to damage.
Innovation Solution
A fluid sensor design featuring at least two measuring tubes with proportional inside diameters, allowing for selection based on actual flow needs to ensure accuracy and reliability, with optional features like thermal insulation and spare tube functionality to enhance device reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single measuring tube with fixed inside diameter is used, then the device structure is simple, but measurement accuracy cannot be guaranteed across the whole measurement range (especially below 25% of full-scale flow)
Solution Approach 1:
The patent divides the measurement system into multiple measuring tubes with different inside diameters (e.g., first measuring tube with diameter D1, second measuring tube with diameter D2 where D1:D2 = 1:2). Each tube is optimized for specific flow ranges, allowing high measurement accuracy across the entire measurement range by selecting the appropriate tube for the current flow condition.
2Reliability
If a single measuring tube is used, then the device is simple to operate, but reliability is poor due to susceptibility to damage and lack of redundancy
Solution Approach 1:
The patent pre-configures multiple measuring tubes with different inside diameters and establishes corresponding switching criteria before operation. The controller automatically selects the appropriate measuring tube based on real-time flow conditions, eliminating the need for manual intervention and maintaining ease of operation while significantly improving reliability through redundancy and damage tolerance.
3Measurement precision
If multiple measuring tubes with different inside diameters are used, then measurement accuracy across the whole range is improved, but the device complexity increases
Solution Approach 1:
The patent designs multiple measuring tubes with different inside diameters (e.g., D1, D2, D3) that can all be integrated into a single sensor assembly. Each tube serves a specific measurement range, but collectively they provide universal measurement capability across the entire flow spectrum. The controller automatically selects the appropriate tube based on flow conditions, maintaining a unified device interface and control system, thus limiting the increase in overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures measurement accuracy across the entire range and improves device reliability by allowing for proportional fluid flow ratios and spare tube functionality, effectively addressing the limitations of existing sensors.
Implementation Method 1
a sensing wire wound around the measuring tube and electrically connected to the terminal plate
Data Source
AI summary
The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.