Multi-Tube Substrate Processing System with Shared Elevation
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Solution Overview
Problem
Batch type substrate processing systems have limitations in productivity and space efficiency due to the use of a single process tube, leading to increased costs and footprint, which hinders mass production capabilities.
Innovation Solution
A substrate processing system with multiple process tubes, each equipped with a substrate boat for multiple substrate stacking and independent process spaces, along with boat elevation units using ball screws and guide rails for efficient substrate handling, and utility modules for gas and cooling control, designed to minimize footprint while increasing processing capacity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single process tube is used in a batch type substrate processing system, then the device complexity is reduced, but the substrate processing amount decreases and productivity is lowered
Solution Approach 1:
The substrate processing system is divided into multiple independent process tubes (first process tube, second process tube, etc.), each capable of independently processing substrates. This segmentation allows parallel processing of substrates across multiple tubes, significantly increasing the substrate processing amount while maintaining relatively simple individual tube configurations.
2Productivity
If multiple stand alone type substrate processing systems are used to increase substrate processing amount, then productivity is improved, but the foot print occupied by the entire system increases
Solution Approach 1:
Multiple process tubes are merged into a single integrated substrate processing system that shares common infrastructure including the substrate boat, boat elevation unit, and control systems. This merging eliminates the need for multiple separate stand-alone systems, increasing substrate processing capacity while minimizing the footprint by consolidating shared components into one compact unit.
3Productivity
If multiple process tubes with independent process spaces are used, then substrate processing capacity increases, but the device complexity increases
Solution Approach 1:
The substrate boat and boat elevation unit serve multiple process tubes simultaneously, performing universal functions across the system. The single substrate boat can be elevated and positioned to serve any of the multiple process tubes, and the elevation unit handles substrate transfer operations for all tubes. This multi-functionality reduces the need for duplicate components in each tube, thereby limiting the increase in device complexity while maintaining high substrate processing capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively increases substrate processing capacity while reducing the overall footprint, enhancing productivity and space efficiency by allowing independent control of process conditions for each tube, thereby improving substrate processing quality and reducing operational costs.
Implementation Method 1
The elevation shaft member may include: a ball screw including a screw shaft and a ball nut to move the ball nut through rotation of the screw shaft
Implementation Method 2
a cooling water supply line extending from the process tube in the second axial direction
Implementation Method 3
a cooling water control part connected to a cooling water supply line extending from the corresponding process tube and configured to control supply of a cooling water
Implementation Method 4
a gas control part connected to a gas supply line extending from the corresponding process tube and configured to control supply of a process gas
Data Source
AI summary
A substrate processing system includes: first and second process tubes spaced apart from each other in a first axial direction to provide process spaces independent from each other; a substrate boat on which a plurality of substrates are multiply stacked and which is provided to each of process spaces of the first and second process tubes; and first and second boat elevation units provided to the first and second process tubes, respectively, to elevate the substrate boat, wherein each of the first and second boat elevation units includes an elevation shaft member disposed in a space between the first and second process tubes.