Multi-Turn Robot Arm Drive Assembly for Full 360° Wafer Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional drive assemblies for robot arms in electronic device manufacturing systems are limited to less than full (360-degree) rotation, leading to substrate defects due to loose particulate matter transfer and reduced flexibility in substrate handling.
Innovation Solution
A multi-turn drive assembly with a forearm and wrist drive assembly that allows for at least 360-degree rotation, utilizing a transmission assembly with multiple wraps of bands around driving and driven members to enable full rotation, and incorporating a torsion spring to maintain constant tension and reduce stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional drive assemblies with limited rotation are used, then the structure is simpler, but substrate defects occur due to particulate matter transfer
Solution Approach 1:
The drive assembly is segmented into multiple independent belt loops, each capable of wrapping around the pulley multiple times. This segmentation allows the system to achieve full 360-degree rotation while maintaining structural control, preventing the link member from passing over other components that could cause particulate transfer.
Solution Approach 2:
Multiple belt wraps are nested around the pulley in a compact arrangement, with each belt loop containing multiple wraps. This nested configuration enables full rotation capability while keeping the overall structure compact and preventing interference between moving components that could generate particulate matter.
2Adaptability or versatility
If conventional drive assemblies with limited rotation are used, then the device complexity is lower, but robot arm flexibility is reduced
Solution Approach 1:
The drive assembly is designed with dynamic multiple-wrap belt loops that can accommodate full 360-degree pulley rotation. The belts are configured to wrap around the pulley multiple times in a controlled manner, allowing the robot arm to achieve greater flexibility and adaptability in substrate handling movements without compromising structural integrity.
3Ease of operation
If metal belts wrap around pulleys only once, then the structure is simpler, but rotation is limited to ±140° to ±160°
Solution Approach 1:
The belt configuration employs periodic wrapping patterns around the pulley, with multiple wraps arranged in a repeating sequence. This periodic arrangement enables the pulley to rotate through full 360 degrees while the belts maintain proper tension and alignment, significantly expanding the rotation range from the conventional ±140° to ±160° limitation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and precise substrate transfer between chambers, avoiding wafer-over-wafer and arm-over-wafer positions, reducing substrate defects and improving throughput by allowing complex robot arm movements.
Implementation Method 1
incorporating a torsion spring to maintain constant tension and reduce stress
Data Source
AI summary
Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.