Multi-Unit Protective Sheet Peeling for Thin Workpiece Processing

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Solution Overview

Problem

The processing capability of semiconductor processing apparatuses deteriorates due to the need for deliberate low-speed peeling of protective sheets from thin workpieces, which can cause cracking and require tape replacement, disrupting the processing flow.

Innovation Solution

A workpiece processing apparatus with multiple peeling units that adjust temperature and use different types of release tapes, allowing simultaneous peeling and tape maintenance, ensuring seamless processing of various workpieces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the protective sheet is peeled at low speed to prevent cracking of thin workpieces, then the workpiece integrity is maintained, but the processing capability of the entire apparatus deteriorates

Engineering Contradiction:

Improveworkpiece integrityVSAvoidprocessing capability

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The apparatus is divided into multiple independent peeling units (first peeling unit and second peeling unit), each capable of processing workpieces separately. This segmentation allows one unit to perform low-speed peeling while another unit can perform maintenance or prepare for the next workpiece, thereby maintaining overall productivity while ensuring workpiece integrity during peeling.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

By providing multiple peeling units that can operate in parallel or sequentially, the system ensures continuous processing capability. While one peeling unit is engaged in low-speed peeling to maintain workpiece integrity, another unit can perform tape replacement or prepare for the next workpiece, eliminating idle time and maintaining continuous productive action.

Inventive Principle:

Principle #20Continuity of useful action

2Adaptability or versatility

If the release tape is switched or replaced after the tape peeling unit is stopped, then the correct tape type can be used for different workpieces, but the processing capability of the entire apparatus deteriorates

Engineering Contradiction:

Improvetape type switchingVSAvoidprocessing capability

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The peeling function is segmented into multiple independent units, each with its own release tape supply and control system. This allows different peeling units to use different tape types simultaneously, enabling versatile processing of different workpiece types without requiring system shutdown for tape switching.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each peeling unit is pre-configured with appropriate release tape types. Before processing begins, the system can pre-load the correct tape type into each peeling unit based on the workpiece schedule, eliminating the need for tape switching during operation and maintaining continuous productivity.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If multiple peeling units are provided with different release tapes, then various types of workpieces can be processed seamlessly, but the device complexity increases

Engineering Contradiction:

Improveworkpiece type processingVSAvoidnumber of peeling units

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Each peeling unit is designed as a universal module capable of processing different workpiece types by using different release tape types. The units share common structural components and control logic, allowing the system to handle multiple workpiece types without requiring completely separate processing lines, thus limiting the increase in overall complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents deterioration of processing capability by enabling low-speed peeling without cracking and allows simultaneous tape maintenance, ensuring efficient handling of different types of workpieces.

Implementation Method 1

each of the peeling units includes a bonding section that bonds a release tape to the protective sheet

Methodology Applied

Scientific EffectThermal bonding: Heating

Implementation Method 2

each of the peeling units is configured to be able to adjust a temperature of the bonding section and the peeling table to be a temperature suitable for processing of a workpiece

Methodology Applied

Scientific EffectTemperature adjustment: Heating

Data Source

PatentUS12528663B2Workpiece processing apparatus

Publication Date: 2026.01.20 TOKYO SEIMITSU CO LTD

AI summary

A workpiece processing apparatus that prevents a processing capability of a processing apparatus from deteriorating due to a peeling unit that peels a protective sheet from a workpiece. A workpiece processing apparatus includes an affixing unit that affixes a dicing tape to a workpiece and a dicing frame, and a plurality of peeling units that peel a protective sheet previously affixed to the workpiece from the workpiece integrated with the dicing frame via the dicing tape.