Multi-Valve Manifold Leak Test Passages for Faster Sealing Checks
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Solution Overview
Problem
Fluid control systems in semiconductor manufacturing face challenges with the time and cost of construction, potential leak points, and limitations in shape and orientation of internal ports in multi-valve manifolds, which are difficult to machine and maintain a polished surface finish.
Innovation Solution
A manifold body with integrated valve body segments and leak test passages that allow for unified and individual leak testing, using branching passages to detect leaks efficiently and reduce assembly complexity, and utilizing additive manufacturing for fabrication to minimize material usage and manufacturing difficulties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple valve manifolds are used to control flow at multiple points, then flow control capability is improved, but manufacturing cost and difficulty increase due to complex machining requirements
Solution Approach 1:
The manifold body is divided into multiple valve body segments that can be independently manufactured and then assembled. Each segment contains specific flow paths and ports, allowing parallel manufacturing of simpler components rather than machining one complex monolithic body. This segmentation reduces manufacturing difficulty while maintaining the ability to control flow at multiple points.
Solution Approach 2:
Multiple valve body segments are combined with a common manifold body that provides unified leak testing capability. The leak test passages are integrated into the manifold body and extend into multiple valve cavities, merging the leak testing function across all valves into a single test system. This reduces the number of separate leak testing operations needed.
2Measurement precision
If traditional leak testing is performed for each valve separately, then leak detection accuracy is improved, but testing time increases
Solution Approach 1:
The leak testing system merges multiple valve leak tests into a single unified test operation. A test fluid introduced at a first location travels through passages in the manifold body to reach multiple valve cavities simultaneously. A single sensor detects leaks from all valves at once, maintaining detection accuracy while reducing testing time from multiple separate tests to one concurrent test.
Solution Approach 2:
The manifold body provides universal leak testing capability that serves multiple valves simultaneously. The same leak test passages and sensor system are used to test all valves in the assembly, making the leak testing system multi-functional rather than requiring dedicated test equipment for each valve.
3Manufacturing precision
If polished surface finish is applied to flow paths, then fluid flow quality is improved, but manufacturing complexity increases for extended and complex paths
Solution Approach 1:
The flow paths are segmented into different zones with different surface finish requirements. Only the portions of flow paths that require polished surfaces are machined to high precision, while other portions use standard machining. This selective application of surface finishing reduces manufacturing complexity while maintaining fluid flow quality where it is most critical.
Data Source
AI summary
A manifold body includes at least first and second valve body segments each comprising an upper perimeter wall portion defining a valve cavity and a lower base portion defining one or more flow ports, a unified leak test port, a first branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the first valve body segment, radially outward of an outer seal surface in the valve cavity, and a second branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the second valve body segment, radially outward of an outer seal surface in the valve cavity.